JPS6140773Y2 - - Google Patents
Info
- Publication number
- JPS6140773Y2 JPS6140773Y2 JP9963583U JP9963583U JPS6140773Y2 JP S6140773 Y2 JPS6140773 Y2 JP S6140773Y2 JP 9963583 U JP9963583 U JP 9963583U JP 9963583 U JP9963583 U JP 9963583U JP S6140773 Y2 JPS6140773 Y2 JP S6140773Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- cylindrical
- comb
- plasma
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 16
- 239000002994 raw material Substances 0.000 claims description 12
- 238000005229 chemical vapour deposition Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 244000126211 Hericium coralloides Species 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000010408 film Substances 0.000 description 13
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000003376 silicon Chemical class 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9963583U JPS609964U (ja) | 1983-06-27 | 1983-06-27 | プラズマ・化学気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9963583U JPS609964U (ja) | 1983-06-27 | 1983-06-27 | プラズマ・化学気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS609964U JPS609964U (ja) | 1985-01-23 |
| JPS6140773Y2 true JPS6140773Y2 (OSRAM) | 1986-11-20 |
Family
ID=30236037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9963583U Granted JPS609964U (ja) | 1983-06-27 | 1983-06-27 | プラズマ・化学気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS609964U (OSRAM) |
-
1983
- 1983-06-27 JP JP9963583U patent/JPS609964U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS609964U (ja) | 1985-01-23 |
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