JPS6140756B2 - - Google Patents

Info

Publication number
JPS6140756B2
JPS6140756B2 JP6052380A JP6052380A JPS6140756B2 JP S6140756 B2 JPS6140756 B2 JP S6140756B2 JP 6052380 A JP6052380 A JP 6052380A JP 6052380 A JP6052380 A JP 6052380A JP S6140756 B2 JPS6140756 B2 JP S6140756B2
Authority
JP
Japan
Prior art keywords
structural material
thin layer
tib
temperature
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6052380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56158867A (en
Inventor
Tsutae Takahashi
Hideo Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6052380A priority Critical patent/JPS56158867A/ja
Publication of JPS56158867A publication Critical patent/JPS56158867A/ja
Publication of JPS6140756B2 publication Critical patent/JPS6140756B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/38—Borides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP6052380A 1980-05-09 1980-05-09 Structural material for use at high temperature Granted JPS56158867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6052380A JPS56158867A (en) 1980-05-09 1980-05-09 Structural material for use at high temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6052380A JPS56158867A (en) 1980-05-09 1980-05-09 Structural material for use at high temperature

Publications (2)

Publication Number Publication Date
JPS56158867A JPS56158867A (en) 1981-12-07
JPS6140756B2 true JPS6140756B2 (enrdf_load_stackoverflow) 1986-09-10

Family

ID=13144749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6052380A Granted JPS56158867A (en) 1980-05-09 1980-05-09 Structural material for use at high temperature

Country Status (1)

Country Link
JP (1) JPS56158867A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104498872B (zh) * 2014-11-14 2017-06-27 中国科学院宁波材料技术与工程研究所 一种高硬度耐磨损的硼化钒涂层及其制备方法

Also Published As

Publication number Publication date
JPS56158867A (en) 1981-12-07

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