JPS6140143B2 - - Google Patents
Info
- Publication number
- JPS6140143B2 JPS6140143B2 JP54015482A JP1548279A JPS6140143B2 JP S6140143 B2 JPS6140143 B2 JP S6140143B2 JP 54015482 A JP54015482 A JP 54015482A JP 1548279 A JP1548279 A JP 1548279A JP S6140143 B2 JPS6140143 B2 JP S6140143B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- receiving element
- electrode
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 21
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 4
- LJCFOYOSGPHIOO-UHFFFAOYSA-N antimony pentoxide Inorganic materials O=[Sb](=O)O[Sb](=O)=O LJCFOYOSGPHIOO-UHFFFAOYSA-N 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 241000288902 Lemur catta Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Facsimile Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1548279A JPS55108781A (en) | 1979-02-15 | 1979-02-15 | Light receiving element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1548279A JPS55108781A (en) | 1979-02-15 | 1979-02-15 | Light receiving element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55108781A JPS55108781A (en) | 1980-08-21 |
| JPS6140143B2 true JPS6140143B2 (fr) | 1986-09-08 |
Family
ID=11890003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1548279A Granted JPS55108781A (en) | 1979-02-15 | 1979-02-15 | Light receiving element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55108781A (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56138969A (en) * | 1980-03-31 | 1981-10-29 | Canon Inc | Photoelectric converter |
| JPS5796575A (en) * | 1980-12-08 | 1982-06-15 | Fuji Xerox Co Ltd | Thin-film image sensor |
| JPS5884457A (ja) * | 1981-11-13 | 1983-05-20 | Fuji Xerox Co Ltd | 長尺薄膜読取装置 |
| JPS5910268A (ja) * | 1982-07-09 | 1984-01-19 | Fuji Xerox Co Ltd | 光電変換素子の製造方法 |
| JPH0618260B2 (ja) * | 1983-09-16 | 1994-03-09 | セイコーエプソン株式会社 | イメージセンサの製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52144992A (en) * | 1976-05-28 | 1977-12-02 | Hitachi Ltd | Light receiving element |
| JPS5339095A (en) * | 1976-09-22 | 1978-04-10 | Hitachi Ltd | Photo detector |
| JPS53102688A (en) * | 1977-02-16 | 1978-09-07 | Western Electric Co | Element |
-
1979
- 1979-02-15 JP JP1548279A patent/JPS55108781A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52144992A (en) * | 1976-05-28 | 1977-12-02 | Hitachi Ltd | Light receiving element |
| JPS5339095A (en) * | 1976-09-22 | 1978-04-10 | Hitachi Ltd | Photo detector |
| JPS53102688A (en) * | 1977-02-16 | 1978-09-07 | Western Electric Co | Element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55108781A (en) | 1980-08-21 |
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