JPS6139344A - Shadow mask - Google Patents

Shadow mask

Info

Publication number
JPS6139344A
JPS6139344A JP15862184A JP15862184A JPS6139344A JP S6139344 A JPS6139344 A JP S6139344A JP 15862184 A JP15862184 A JP 15862184A JP 15862184 A JP15862184 A JP 15862184A JP S6139344 A JPS6139344 A JP S6139344A
Authority
JP
Japan
Prior art keywords
shadow mask
coarseness
pores
iron
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15862184A
Other languages
Japanese (ja)
Other versions
JPH0452585B2 (en
Inventor
Hirozo Sugai
菅井 普三
Takashi Kuze
久世 孝
Fumio Mori
盛 二三男
Noriaki Yagi
典章 八木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP15862184A priority Critical patent/JPS6139344A/en
Publication of JPS6139344A publication Critical patent/JPS6139344A/en
Publication of JPH0452585B2 publication Critical patent/JPH0452585B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/14Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Abstract

PURPOSE:To enable uniformity of form, pitch etc. of pores over a shadow mask for a color picture tube, by forming the shadow mask while regulating the coarseness of its surface by using mild steel etc. and forming pores by photoetching. CONSTITUTION:Over a plate material of a mild steel- or iron-nickel type alloy, or an iron-nickel-cobalt type alloy, buffing or acid cleansing is applied to regulate the surface coarseness within the center line means coarseness (Ra) 0.1- 0.4mum according to B0601, JIS, and the material is formed. Photoetching is applied thereon to prepare numerous circular pores, and a shadow mask for a color picture tube is made up. Thus, by regulating coarseness of the material surface within a specific coarseness, unevenness of form and pitch of pores caused by too much smooth surface is prevented, and a high accuracy and minuteness of the shadow mask can be secured.

Description

【発明の詳細な説明】 [発明の技術分野] 本発明はシャドウマスクに関し、更に詳しくは、高精度
・高精細のシャドウマスクに関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a shadow mask, and more particularly to a high-precision, high-definition shadow mask.

[発明の技術的背景とその問題点] カラー受像管螢光面の直前には、所定の設計基準に基づ
いて穿設された多数の開孔(ドツト状、すだれ状)を有
するシャドウマスクが配設されている。
[Technical background of the invention and its problems] Immediately in front of the color picture tube fluorescing surface, a shadow mask is arranged which has a large number of apertures (dot-shaped, blind-shaped) formed based on predetermined design standards. It is set up.

この材料としては、湧常、厚み約0.15IIlilの
薄い軟鋼板が採用される。最近では、低熱膨張特性を備
えた鉄−ニッケル系合金であるインバ合金(l nva
r)が採用され始めている。
As this material, a thin mild steel plate having a thickness of about 0.15 II lil is usually employed. Recently, Invar alloy (Lnva alloy), which is an iron-nickel alloy with low thermal expansion characteristics, has been developed.
r) is beginning to be adopted.

これらシャドウマスクは概ね次のようにして製造されて
いる。
These shadow masks are generally manufactured as follows.

まず、この板材を洗浄し、フォトレジストを塗り露光し
た後、塩化第二鉄でエツチングすることにより開孔を形
成する。
First, this plate material is cleaned, coated with photoresist, exposed, and then etched with ferric chloride to form holes.

その後、全体にプレス加工を施して所定の曲率半経の湾
曲面を形成し、最後にスチームで酸化して熱輻射能の向
上・乱反射防止のためにその表面全体を黒化する。
Thereafter, the entire surface is pressed to form a curved surface with a predetermined curvature semi-longitudinal, and finally the entire surface is blackened by steam oxidation to improve thermal radiation and prevent diffused reflection.

しかしながら、このようなフォトエツチング法を適用し
たシャドウマスクの製造方法には、以下のような問題点
が孕まれている。
However, the method of manufacturing a shadow mask using such a photoetching method has the following problems.

すなわち、穿設される開孔は板材の材質、形状、エツチ
ングの条件などによってその形状が微妙に影響を受ける
ので設計基準に忠実な高精度・高精細の開孔の穿設制御
がはなはだ困難であること、とくに、近年用いられ始め
ているインバ合金を使用するときには、そのエツチング
速度が軟鋼板に比べて著しく小さいことと相俟って形成
された開孔それ自体の形状、開孔間のピッチなどが不均
一になるという問題がある。
In other words, the shape of the holes to be drilled is subtly affected by the material, shape, etching conditions, etc. of the plate material, so it is extremely difficult to control the drilling of holes with high precision and high definition that is faithful to the design standards. In particular, when using Invar alloy, which has started to be used in recent years, the etching rate is significantly lower than that of mild steel sheets, and the shape of the holes themselves, the pitch between the holes, etc. There is a problem that it becomes uneven.

[発明の目的] 本発明は、開孔それ自体の形状1冊孔間のピッチなどが
比較的均一であるシャドウマスクを提供することを目的
とする。
[Object of the Invention] An object of the present invention is to provide a shadow mask in which the shape of the openings themselves and the pitch between the holes are relatively uniform.

[発明の概要J 本発明者らは、シャドウマスクを鋭意研究した結果、開
孔の不均一性は、表面粗さによってもたらされるという
事を見い出した。
[Summary of the Invention J As a result of intensive research into shadow masks, the present inventors discovered that non-uniformity of openings is caused by surface roughness.

本発明は、この知見をもとに完成されたものである。The present invention was completed based on this knowledge.

即ち、本発明のシャドウマスクは、JISBoeoi 
 テ中心線平均粗さ(Ra )が0.1〜0.4μ讃、
好ましくは、0.15〜0.35μmの範囲の表面粗さ
を有することを特徴とする。
That is, the shadow mask of the present invention has JIS Boeoi
The center line average roughness (Ra) is 0.1 to 0.4μ,
Preferably, it is characterized by having a surface roughness in the range of 0.15 to 0.35 μm.

このように、表面粗さを規定することにより、開孔の形
状及びピッチの不均一性を軽減できる。
By defining the surface roughness in this way, non-uniformity in the shape and pitch of the openings can be reduced.

即ち、表面がなめらかすぎると、レジストに対する密着
性が低下し、レジストが必要な部分に密着せず、一方、
表面があれすぎていると、その凸状の部分だけエツチン
グ速度が遅くなり、その為、開孔壁の一部は、十分にエ
ツチングされずに残り、開孔の形状は不均一になる。
That is, if the surface is too smooth, the adhesion to the resist will decrease, and the resist will not adhere to the necessary areas;
If the surface is too rough, the etching rate will be slow for the convex portions, so that a portion of the aperture wall will remain unetched and the shape of the aperture will be non-uniform.

したがって、これらの点を考慮すると、中心線平均粗さ
(Ra)は0.1〜0.4uta 、更には、0.15
〜0.35μ膳が好ましい。
Therefore, considering these points, the center line average roughness (Ra) is 0.1 to 0.4uta, and even 0.15
~0.35μ set is preferable.

これらシャドウマスクの素材としては、例えば、軟鋼、
インバ合金、鉄−ニッケル−コバルト系合金等がある。
Materials for these shadow masks include, for example, mild steel,
There are Invar alloys, iron-nickel-cobalt alloys, etc.

このうち、インバ合金、鉄−ニッケル−コバルト系合金
は、エツチング速度が特におそい為、開孔形状が表面粗
さにより影響されやすく、本発明が特に有用である。
Among these, Invar alloys and iron-nickel-cobalt alloys have particularly slow etching rates, and the shape of the openings is easily affected by surface roughness, making the present invention particularly useful.

又、本発明は高精度・高精細なシャドウマスク程有用で
ある。即ち、開孔のピッチが、0.38〜0.7+u+
 (中精II)から0.2mm (高精細)になるにつ
れ、開孔形状は、表面粗さにより影響されやすく本発明
は有用となる。
Further, the present invention is more useful as the shadow mask becomes more precise and more precise. That is, the pitch of the openings is 0.38 to 0.7+u+
As the diameter increases from (medium precision II) to 0.2 mm (high precision), the pore shape becomes more susceptible to surface roughness and the present invention becomes more useful.

以上述べた表面粗さは、素材の圧延上り後、例えば、パ
フ研磨、酸洗、ショツトブラスト又はダルロール加工等
を適用することによって得られる。
The above-described surface roughness can be obtained by applying, for example, puff polishing, pickling, shot blasting, dull rolling, etc. after rolling the material.

[発明の実施例] ピッチ0,38o+n+の円状開孔を有する14インチ
用のシャドウマスクを第1表に示す如く製造した。その
結果、形成された開孔に関して、開孔形状及び開孔均一
性を目視によって全体に渡って均一かどうか観察し、第
1表に併記した。
[Examples of the Invention] A 14-inch shadow mask having circular openings with a pitch of 0.38o+n+ was manufactured as shown in Table 1. As a result, the shape and uniformity of the pores formed were visually observed to see if they were uniform throughout, and the results are also listed in Table 1.

この表から明らかな如く、表面粗さが0.1〜0.4μ
僧であると、開孔形状の規則性及び開孔のシャドウマス
ク全体の均一性が得られることがわかる。
As is clear from this table, the surface roughness is 0.1 to 0.4μ
It can be seen that the regularity of the aperture shape and the uniformity of the entire shadow mask of the apertures can be obtained when the apertures are formed.

[発明の効果] 以上述べた如く、本発明のシャドウマスクは、表面粗さ
を規定したことにより、開孔それ自体の形状及び開孔全
体を比較的均一にできる。
[Effects of the Invention] As described above, in the shadow mask of the present invention, by defining the surface roughness, the shape of the opening itself and the entire opening can be made relatively uniform.

Claims (1)

【特許請求の範囲】 1、JIS B0601.で中心線平均粗さ(Ra)が
0.1〜0.4μmであるシャドウマスク。 2、シャドウマスクが軟鋼からなる特許請求の範囲第1
項に記載のシャドウマスク。 3、シャドウマスクが鉄−ニッケル系合金からなる特許
請求の範囲第1項に記載のシャド ウマスク。 4、シャドウマスクが鉄−ニッケル−コバルト系合金か
らなる特許請求の範囲第1項に記 載のシャドウマスク。
[Claims] 1. JIS B0601. A shadow mask having a center line average roughness (Ra) of 0.1 to 0.4 μm. 2. Claim 1 in which the shadow mask is made of mild steel
Shadow mask as described in section. 3. The shadow mask according to claim 1, wherein the shadow mask is made of an iron-nickel alloy. 4. The shadow mask according to claim 1, wherein the shadow mask is made of an iron-nickel-cobalt alloy.
JP15862184A 1984-07-31 1984-07-31 Shadow mask Granted JPS6139344A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15862184A JPS6139344A (en) 1984-07-31 1984-07-31 Shadow mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15862184A JPS6139344A (en) 1984-07-31 1984-07-31 Shadow mask

Publications (2)

Publication Number Publication Date
JPS6139344A true JPS6139344A (en) 1986-02-25
JPH0452585B2 JPH0452585B2 (en) 1992-08-24

Family

ID=15675708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15862184A Granted JPS6139344A (en) 1984-07-31 1984-07-31 Shadow mask

Country Status (1)

Country Link
JP (1) JPS6139344A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238003A (en) * 1986-04-07 1987-10-19 Nisshin Steel Co Ltd Stock for shadow mask and its production
JPH03281756A (en) * 1990-02-15 1991-12-12 Nkk Corp Fe-ni alloy sheet for shadow mask and its manufacture
DE4123567A1 (en) * 1990-07-17 1992-01-23 Nippon Kokan Kk FE-NI ALLOY SHEET FOR HOLE MASKS AND METHOD FOR THE PRODUCTION THEREOF
JPH04103743A (en) * 1990-08-22 1992-04-06 Nkk Corp Fe-ni alloy thin sheet for shadow mask and its manufacture
JPH04103744A (en) * 1990-08-22 1992-04-06 Nkk Corp Fe-ni alloy thin sheet for shadow mask and its manufacture
DE4131396A1 (en) * 1990-10-31 1992-05-07 Nippon Kokan Kk FE-NI ALLOY SHEET AND METHOD FOR PRODUCING THE SAME
US5252151A (en) * 1990-02-15 1993-10-12 Nkk Corporation Fe-Ni alloy sheet for shadow mask having a low silicon segregation and method for manufacturing same
JPH0649598A (en) * 1992-01-31 1994-02-22 Nkk Corp Fe-ni alloy sheet and fe-ni-co alloy sheet for shadow mask excellent in blackening treatability
US5821686A (en) * 1992-07-16 1998-10-13 Tokyo Kohan Co., Ltd. Inner-shield material to be attached inside a color cathode ray tube
WO2019098168A1 (en) * 2017-11-14 2019-05-23 大日本印刷株式会社 Metal plate for producing vapor deposition masks, inspection method for metal plates, production method for metal plates, vapor deposition mask, vapor deposition mask device, and production method for vapor deposition masks

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232607A (en) * 1983-06-16 1984-12-27 Toyo Kohan Co Ltd Manufacture of metallic plate for shadow mask

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232607A (en) * 1983-06-16 1984-12-27 Toyo Kohan Co Ltd Manufacture of metallic plate for shadow mask

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534081B2 (en) * 1986-04-07 1993-05-21 Nisshin Steel Co Ltd
JPS62238003A (en) * 1986-04-07 1987-10-19 Nisshin Steel Co Ltd Stock for shadow mask and its production
JPH03281756A (en) * 1990-02-15 1991-12-12 Nkk Corp Fe-ni alloy sheet for shadow mask and its manufacture
US5252151A (en) * 1990-02-15 1993-10-12 Nkk Corporation Fe-Ni alloy sheet for shadow mask having a low silicon segregation and method for manufacturing same
DE4123567A1 (en) * 1990-07-17 1992-01-23 Nippon Kokan Kk FE-NI ALLOY SHEET FOR HOLE MASKS AND METHOD FOR THE PRODUCTION THEREOF
FR2664908A1 (en) * 1990-07-17 1992-01-24 Nippon Kokan Kk FER-NICKEL ALLOY SHEET FOR TELEVISION TUBE MASK.
US5127965A (en) * 1990-07-17 1992-07-07 Nkk Corporation Fe-ni alloy sheet for shadow mask and method for manufacturing same
JPH04103743A (en) * 1990-08-22 1992-04-06 Nkk Corp Fe-ni alloy thin sheet for shadow mask and its manufacture
JPH04103744A (en) * 1990-08-22 1992-04-06 Nkk Corp Fe-ni alloy thin sheet for shadow mask and its manufacture
DE4131396C2 (en) * 1990-10-31 1997-09-18 Nippon Kokan Kk Fe-Ni alloy sheet and method of manufacturing the same
DE4131396A1 (en) * 1990-10-31 1992-05-07 Nippon Kokan Kk FE-NI ALLOY SHEET AND METHOD FOR PRODUCING THE SAME
JPH0649598A (en) * 1992-01-31 1994-02-22 Nkk Corp Fe-ni alloy sheet and fe-ni-co alloy sheet for shadow mask excellent in blackening treatability
US5821686A (en) * 1992-07-16 1998-10-13 Tokyo Kohan Co., Ltd. Inner-shield material to be attached inside a color cathode ray tube
WO2019098168A1 (en) * 2017-11-14 2019-05-23 大日本印刷株式会社 Metal plate for producing vapor deposition masks, inspection method for metal plates, production method for metal plates, vapor deposition mask, vapor deposition mask device, and production method for vapor deposition masks
JPWO2019098168A1 (en) * 2017-11-14 2019-11-14 大日本印刷株式会社 Metal plate for manufacturing vapor deposition mask, metal plate inspection method, metal plate production method, vapor deposition mask, vapor deposition mask device, and vapor deposition mask production method
JP2019214788A (en) * 2017-11-14 2019-12-19 大日本印刷株式会社 Metal plate for manufacturing vapor deposition mask, inspection method of metal plate, manufacturing method of metal plate, vapor deposition mask, vapor deposition mask device, and manufacturing method of vapor deposition mask
KR20200086691A (en) * 2017-11-14 2020-07-17 다이니폰 인사츠 가부시키가이샤 Metal plate for manufacturing deposition mask, metal plate inspection method, metal plate manufacturing method, deposition mask, deposition mask device, and deposition mask manufacturing method
JP2020190033A (en) * 2017-11-14 2020-11-26 大日本印刷株式会社 Metal plate for manufacturing vapor deposition mask, method for inspecting metal plate, method for manufacturing metal plate, vapor deposition mask, vapor deposition mask device and method for manufacturing vapor deposition mask
US11237481B2 (en) 2017-11-14 2022-02-01 Dai Nippon Printing Co., Ltd. Metal plate for manufacturing deposition mask and manufacturing method for metal plate, and deposition mask and manufacturing method for deposition mask
US11733607B2 (en) 2017-11-14 2023-08-22 Dai Nippon Printing Co., Ltd. Metal plate for producing vapor deposition masks, inspection method for metal plates, production method for metal plates, vapor deposition mask, vapor deposition mask device, and production method for vapor deposition masks
US12117727B2 (en) 2017-11-14 2024-10-15 Dai Nippon Printing Co., Ltd. Metal plate for manufacturing deposition mask and manufacturing method for metal plate, and deposition mask and manufacturing method for deposition mask

Also Published As

Publication number Publication date
JPH0452585B2 (en) 1992-08-24

Similar Documents

Publication Publication Date Title
JPS6139344A (en) Shadow mask
US20040018372A1 (en) Etching substrate material, etching process and article obtained by etching
US5567555A (en) Method for manufacturing shadow mask and shadow mask manufactured by said method
JPS58167770A (en) Preparation of shadow mask
JPS6139345A (en) Shadow mask
JPH0243380A (en) Metallic mold for forming optical disk substrate and production thereof
KR100198919B1 (en) Plate material for shadow mask
US4585518A (en) Method of manufacturing shadow mask
JP2771372B2 (en) Aperture grill and method of manufacturing the same
JPS62243782A (en) Production of thin metallic plate for shadow mask
KR100680669B1 (en) Shadow Mask and Base Material therefor
JPS6139343A (en) Shadow mask
JP3155782B2 (en) Original plate for shadow mask
JPH079073B2 (en) Film formation method
JP2667700B2 (en) Method for manufacturing shadow mask material
JPH0344842B2 (en)
JPS6139342A (en) Shadow mask
JP3049388B2 (en) Method of manufacturing material for shadow mask
JPS58214252A (en) Production method of shadow mask
JPS60187682A (en) Manufacture of shadow mask
JPS62243780A (en) Thin plate for shadow mask
JP2001210232A (en) Method for manufacturing shadow mask
JPH0366395B2 (en)
JPS627412A (en) Preparation of ultrafine perforated filter
KR19990006666A (en) Aperture Grill

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term