JPS6138907B2 - - Google Patents

Info

Publication number
JPS6138907B2
JPS6138907B2 JP16228678A JP16228678A JPS6138907B2 JP S6138907 B2 JPS6138907 B2 JP S6138907B2 JP 16228678 A JP16228678 A JP 16228678A JP 16228678 A JP16228678 A JP 16228678A JP S6138907 B2 JPS6138907 B2 JP S6138907B2
Authority
JP
Japan
Prior art keywords
signal
defect
inspected
circuit
value holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16228678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5590189A (en
Inventor
Yasukazu Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP16228678A priority Critical patent/JPS5590189A/ja
Publication of JPS5590189A publication Critical patent/JPS5590189A/ja
Publication of JPS6138907B2 publication Critical patent/JPS6138907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP16228678A 1978-12-27 1978-12-27 Defect detector Granted JPS5590189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16228678A JPS5590189A (en) 1978-12-27 1978-12-27 Defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16228678A JPS5590189A (en) 1978-12-27 1978-12-27 Defect detector

Publications (2)

Publication Number Publication Date
JPS5590189A JPS5590189A (en) 1980-07-08
JPS6138907B2 true JPS6138907B2 (OSRAM) 1986-09-01

Family

ID=15751588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16228678A Granted JPS5590189A (en) 1978-12-27 1978-12-27 Defect detector

Country Status (1)

Country Link
JP (1) JPS5590189A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004093338A (ja) * 2002-08-30 2004-03-25 Nec Corp 外観検査装置および外観検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004093338A (ja) * 2002-08-30 2004-03-25 Nec Corp 外観検査装置および外観検査方法

Also Published As

Publication number Publication date
JPS5590189A (en) 1980-07-08

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