JPS6138829B2 - - Google Patents

Info

Publication number
JPS6138829B2
JPS6138829B2 JP55138469A JP13846980A JPS6138829B2 JP S6138829 B2 JPS6138829 B2 JP S6138829B2 JP 55138469 A JP55138469 A JP 55138469A JP 13846980 A JP13846980 A JP 13846980A JP S6138829 B2 JPS6138829 B2 JP S6138829B2
Authority
JP
Japan
Prior art keywords
electron beam
measuring
electron
current
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55138469A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5763463A (en
Inventor
Bunro Komatsu
Yasuo Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55138469A priority Critical patent/JPS5763463A/ja
Publication of JPS5763463A publication Critical patent/JPS5763463A/ja
Publication of JPS6138829B2 publication Critical patent/JPS6138829B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP55138469A 1980-10-03 1980-10-03 Wafer for measuring diameter of electron beam and beam current Granted JPS5763463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55138469A JPS5763463A (en) 1980-10-03 1980-10-03 Wafer for measuring diameter of electron beam and beam current

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55138469A JPS5763463A (en) 1980-10-03 1980-10-03 Wafer for measuring diameter of electron beam and beam current

Publications (2)

Publication Number Publication Date
JPS5763463A JPS5763463A (en) 1982-04-16
JPS6138829B2 true JPS6138829B2 (enrdf_load_stackoverflow) 1986-09-01

Family

ID=15222769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55138469A Granted JPS5763463A (en) 1980-10-03 1980-10-03 Wafer for measuring diameter of electron beam and beam current

Country Status (1)

Country Link
JP (1) JPS5763463A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW464947B (en) 1999-11-29 2001-11-21 Ushio Electric Inc Measuring apparatus of electron beam quantity and processing apparatus of electron beam irradiation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5130762A (ja) * 1974-09-09 1976-03-16 Nippon Telegraph & Telephone Denshibiimurokoniokeru biimukeisokuteihoho
JPS5819041B2 (ja) * 1976-08-11 1983-04-15 富士通株式会社 電子ビ−ム径の測定方法

Also Published As

Publication number Publication date
JPS5763463A (en) 1982-04-16

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