JPS6138401B2 - - Google Patents

Info

Publication number
JPS6138401B2
JPS6138401B2 JP14650178A JP14650178A JPS6138401B2 JP S6138401 B2 JPS6138401 B2 JP S6138401B2 JP 14650178 A JP14650178 A JP 14650178A JP 14650178 A JP14650178 A JP 14650178A JP S6138401 B2 JPS6138401 B2 JP S6138401B2
Authority
JP
Japan
Prior art keywords
light
grating
optical system
width
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14650178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5572806A (en
Inventor
Yoshisada Oshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14650178A priority Critical patent/JPS5572806A/ja
Publication of JPS5572806A publication Critical patent/JPS5572806A/ja
Publication of JPS6138401B2 publication Critical patent/JPS6138401B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP14650178A 1978-11-29 1978-11-29 Contour display unit Granted JPS5572806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14650178A JPS5572806A (en) 1978-11-29 1978-11-29 Contour display unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14650178A JPS5572806A (en) 1978-11-29 1978-11-29 Contour display unit

Publications (2)

Publication Number Publication Date
JPS5572806A JPS5572806A (en) 1980-06-02
JPS6138401B2 true JPS6138401B2 (enrdf_load_stackoverflow) 1986-08-29

Family

ID=15409046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14650178A Granted JPS5572806A (en) 1978-11-29 1978-11-29 Contour display unit

Country Status (1)

Country Link
JP (1) JPS5572806A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002090261A (ja) * 2000-09-13 2002-03-27 Hitachi Chem Co Ltd モアレ縞の測定方法、フィルムの製造方法、およびモアレ縞の測定を行なうためのプログラムを格納する記録媒体
JP2006058092A (ja) * 2004-08-18 2006-03-02 Fuji Xerox Co Ltd ３次元形状測定装置および方法
EP3044538B1 (en) * 2013-09-10 2021-06-30 BAE Systems PLC Optical surface roughness measurement

Also Published As

Publication number Publication date
JPS5572806A (en) 1980-06-02

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