JPS6136377B2 - - Google Patents
Info
- Publication number
- JPS6136377B2 JPS6136377B2 JP9949377A JP9949377A JPS6136377B2 JP S6136377 B2 JPS6136377 B2 JP S6136377B2 JP 9949377 A JP9949377 A JP 9949377A JP 9949377 A JP9949377 A JP 9949377A JP S6136377 B2 JPS6136377 B2 JP S6136377B2
- Authority
- JP
- Japan
- Prior art keywords
- hydrazine
- etching solution
- concentration
- platinum electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 82
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 44
- 238000005530 etching Methods 0.000 claims description 23
- 229910052697 platinum Inorganic materials 0.000 claims description 22
- 239000000243 solution Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 11
- 239000007864 aqueous solution Substances 0.000 claims description 9
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical class Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 claims description 9
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims description 6
- 235000009508 confectionery Nutrition 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 17
- 239000007788 liquid Substances 0.000 description 9
- 239000002131 composite material Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229920001817 Agar Polymers 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949377A JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9949377A JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5433673A JPS5433673A (en) | 1979-03-12 |
| JPS6136377B2 true JPS6136377B2 (de) | 1986-08-18 |
Family
ID=14248814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9949377A Granted JPS5433673A (en) | 1977-08-22 | 1977-08-22 | Automatic etching unit for semiconductor composite |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5433673A (de) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10793806B2 (en) | 2010-09-24 | 2020-10-06 | Ecolab Usa Inc. | Conveyor lubricants including emulsions and methods employing them |
| US10815448B2 (en) | 2005-03-15 | 2020-10-27 | Ecolab Usa Inc. | Lubricant for conveying containers |
| US10844314B2 (en) | 2013-03-11 | 2020-11-24 | Ecolab Usa Inc. | Lubrication of transfer plates using an oil or oil in water emulsions |
| US10851325B2 (en) | 2005-03-15 | 2020-12-01 | Ecolab Usa Inc. | Dry lubricant for conveying containers |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0451474Y2 (de) * | 1986-05-15 | 1992-12-03 |
-
1977
- 1977-08-22 JP JP9949377A patent/JPS5433673A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10815448B2 (en) | 2005-03-15 | 2020-10-27 | Ecolab Usa Inc. | Lubricant for conveying containers |
| US10851325B2 (en) | 2005-03-15 | 2020-12-01 | Ecolab Usa Inc. | Dry lubricant for conveying containers |
| US10793806B2 (en) | 2010-09-24 | 2020-10-06 | Ecolab Usa Inc. | Conveyor lubricants including emulsions and methods employing them |
| US10844314B2 (en) | 2013-03-11 | 2020-11-24 | Ecolab Usa Inc. | Lubrication of transfer plates using an oil or oil in water emulsions |
| US11312919B2 (en) | 2013-03-11 | 2022-04-26 | Ecolab Usa Inc. | Lubrication of transfer plates using an oil or oil in water emulsions |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5433673A (en) | 1979-03-12 |
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