JPS6135707B2 - - Google Patents

Info

Publication number
JPS6135707B2
JPS6135707B2 JP51081541A JP8154176A JPS6135707B2 JP S6135707 B2 JPS6135707 B2 JP S6135707B2 JP 51081541 A JP51081541 A JP 51081541A JP 8154176 A JP8154176 A JP 8154176A JP S6135707 B2 JPS6135707 B2 JP S6135707B2
Authority
JP
Japan
Prior art keywords
gate electrode
silicon
oxide film
forming
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51081541A
Other languages
English (en)
Japanese (ja)
Other versions
JPS536580A (en
Inventor
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8154176A priority Critical patent/JPS536580A/ja
Publication of JPS536580A publication Critical patent/JPS536580A/ja
Publication of JPS6135707B2 publication Critical patent/JPS6135707B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP8154176A 1976-07-08 1976-07-08 Integrated circuit Granted JPS536580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8154176A JPS536580A (en) 1976-07-08 1976-07-08 Integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8154176A JPS536580A (en) 1976-07-08 1976-07-08 Integrated circuit

Publications (2)

Publication Number Publication Date
JPS536580A JPS536580A (en) 1978-01-21
JPS6135707B2 true JPS6135707B2 (OSRAM) 1986-08-14

Family

ID=13749148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8154176A Granted JPS536580A (en) 1976-07-08 1976-07-08 Integrated circuit

Country Status (1)

Country Link
JP (1) JPS536580A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111786A (en) * 1978-02-21 1979-09-01 Nec Corp Manufacture for complementary silicon gate mos field effect semiconductor device

Also Published As

Publication number Publication date
JPS536580A (en) 1978-01-21

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