JPS6135561Y2 - - Google Patents
Info
- Publication number
- JPS6135561Y2 JPS6135561Y2 JP16684682U JP16684682U JPS6135561Y2 JP S6135561 Y2 JPS6135561 Y2 JP S6135561Y2 JP 16684682 U JP16684682 U JP 16684682U JP 16684682 U JP16684682 U JP 16684682U JP S6135561 Y2 JPS6135561 Y2 JP S6135561Y2
- Authority
- JP
- Japan
- Prior art keywords
- glow discharge
- exhaust chamber
- high frequency
- vacuum tube
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008020 evaporation Effects 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007733 ion plating Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684682U JPS5969966U (ja) | 1982-11-02 | 1982-11-02 | グロ−放電発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16684682U JPS5969966U (ja) | 1982-11-02 | 1982-11-02 | グロ−放電発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5969966U JPS5969966U (ja) | 1984-05-12 |
| JPS6135561Y2 true JPS6135561Y2 (enrdf_load_stackoverflow) | 1986-10-16 |
Family
ID=30365180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16684682U Granted JPS5969966U (ja) | 1982-11-02 | 1982-11-02 | グロ−放電発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5969966U (enrdf_load_stackoverflow) |
-
1982
- 1982-11-02 JP JP16684682U patent/JPS5969966U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5969966U (ja) | 1984-05-12 |