JPS6135270B2 - - Google Patents

Info

Publication number
JPS6135270B2
JPS6135270B2 JP54073723A JP7372379A JPS6135270B2 JP S6135270 B2 JPS6135270 B2 JP S6135270B2 JP 54073723 A JP54073723 A JP 54073723A JP 7372379 A JP7372379 A JP 7372379A JP S6135270 B2 JPS6135270 B2 JP S6135270B2
Authority
JP
Japan
Prior art keywords
silicon
transition metal
sputtering
substrate
metal silicide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54073723A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56275A (en
Inventor
Toshihiko Fukuyama
Shintaro Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP7372379A priority Critical patent/JPS56275A/ja
Publication of JPS56275A publication Critical patent/JPS56275A/ja
Publication of JPS6135270B2 publication Critical patent/JPS6135270B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP7372379A 1979-06-12 1979-06-12 Metal film formation Granted JPS56275A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7372379A JPS56275A (en) 1979-06-12 1979-06-12 Metal film formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7372379A JPS56275A (en) 1979-06-12 1979-06-12 Metal film formation

Publications (2)

Publication Number Publication Date
JPS56275A JPS56275A (en) 1981-01-06
JPS6135270B2 true JPS6135270B2 (enrdf_load_stackoverflow) 1986-08-12

Family

ID=13526424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7372379A Granted JPS56275A (en) 1979-06-12 1979-06-12 Metal film formation

Country Status (1)

Country Link
JP (1) JPS56275A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60188693U (ja) * 1984-05-25 1985-12-13 有限会社　船舶ジエツト推進研究所 船舶

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333053B2 (enrdf_load_stackoverflow) * 1973-08-15 1978-09-12
JPS5165038A (ja) * 1974-12-04 1976-06-05 Suwa Seikosha Kk Tokeiyogaisobuhin
JPS5915982B2 (ja) * 1977-08-24 1984-04-12 日電アネルバ株式会社 放電化学反応装置

Also Published As

Publication number Publication date
JPS56275A (en) 1981-01-06

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