JPS6132518A - 位置決め制御装置 - Google Patents

位置決め制御装置

Info

Publication number
JPS6132518A
JPS6132518A JP15294884A JP15294884A JPS6132518A JP S6132518 A JPS6132518 A JP S6132518A JP 15294884 A JP15294884 A JP 15294884A JP 15294884 A JP15294884 A JP 15294884A JP S6132518 A JPS6132518 A JP S6132518A
Authority
JP
Japan
Prior art keywords
output
dead zone
light
receiving element
addition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15294884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574212B2 (enExample
Inventor
Tetsuzo Tanimoto
谷本　哲三
Tsutomu Tanaka
勉 田中
Minoru Yoshida
実 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15294884A priority Critical patent/JPS6132518A/ja
Publication of JPS6132518A publication Critical patent/JPS6132518A/ja
Publication of JPH0574212B2 publication Critical patent/JPH0574212B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15294884A 1984-07-25 1984-07-25 位置決め制御装置 Granted JPS6132518A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15294884A JPS6132518A (ja) 1984-07-25 1984-07-25 位置決め制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15294884A JPS6132518A (ja) 1984-07-25 1984-07-25 位置決め制御装置

Publications (2)

Publication Number Publication Date
JPS6132518A true JPS6132518A (ja) 1986-02-15
JPH0574212B2 JPH0574212B2 (enExample) 1993-10-18

Family

ID=15551656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15294884A Granted JPS6132518A (ja) 1984-07-25 1984-07-25 位置決め制御装置

Country Status (1)

Country Link
JP (1) JPS6132518A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02115991U (enExample) * 1989-03-07 1990-09-17
CN100462875C (zh) * 2006-04-14 2009-02-18 中国科学院长春光学精密机械与物理研究所 具有间隙特性传动机构的控制系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02115991U (enExample) * 1989-03-07 1990-09-17
CN100462875C (zh) * 2006-04-14 2009-02-18 中国科学院长春光学精密机械与物理研究所 具有间隙特性传动机构的控制系统

Also Published As

Publication number Publication date
JPH0574212B2 (enExample) 1993-10-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term