JPS6132515B2 - - Google Patents

Info

Publication number
JPS6132515B2
JPS6132515B2 JP51134115A JP13411576A JPS6132515B2 JP S6132515 B2 JPS6132515 B2 JP S6132515B2 JP 51134115 A JP51134115 A JP 51134115A JP 13411576 A JP13411576 A JP 13411576A JP S6132515 B2 JPS6132515 B2 JP S6132515B2
Authority
JP
Japan
Prior art keywords
getter element
getter
temperature
pump
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51134115A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5359909A (en
Inventor
Yasushi Nakaizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13411576A priority Critical patent/JPS5359909A/ja
Publication of JPS5359909A publication Critical patent/JPS5359909A/ja
Publication of JPS6132515B2 publication Critical patent/JPS6132515B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
JP13411576A 1976-11-10 1976-11-10 Non-vaporous getter pump device Granted JPS5359909A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13411576A JPS5359909A (en) 1976-11-10 1976-11-10 Non-vaporous getter pump device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13411576A JPS5359909A (en) 1976-11-10 1976-11-10 Non-vaporous getter pump device

Publications (2)

Publication Number Publication Date
JPS5359909A JPS5359909A (en) 1978-05-30
JPS6132515B2 true JPS6132515B2 (en, 2012) 1986-07-28

Family

ID=15120799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13411576A Granted JPS5359909A (en) 1976-11-10 1976-11-10 Non-vaporous getter pump device

Country Status (1)

Country Link
JP (1) JPS5359909A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021418U (en, 2012) * 1988-06-13 1990-01-08

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651313B2 (en, 2012) * 1972-06-05 1981-12-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021418U (en, 2012) * 1988-06-13 1990-01-08

Also Published As

Publication number Publication date
JPS5359909A (en) 1978-05-30

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