JPS6131857B2 - - Google Patents

Info

Publication number
JPS6131857B2
JPS6131857B2 JP6584179A JP6584179A JPS6131857B2 JP S6131857 B2 JPS6131857 B2 JP S6131857B2 JP 6584179 A JP6584179 A JP 6584179A JP 6584179 A JP6584179 A JP 6584179A JP S6131857 B2 JPS6131857 B2 JP S6131857B2
Authority
JP
Japan
Prior art keywords
resist
ionizing radiation
pattern
resists
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6584179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55157736A (en
Inventor
Takama Mizoguchi
Tsukasa Tada
Masanobu Koda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP6584179A priority Critical patent/JPS55157736A/ja
Publication of JPS55157736A publication Critical patent/JPS55157736A/ja
Publication of JPS6131857B2 publication Critical patent/JPS6131857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP6584179A 1979-05-28 1979-05-28 Ionized radiation sensitive negative type resist Granted JPS55157736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6584179A JPS55157736A (en) 1979-05-28 1979-05-28 Ionized radiation sensitive negative type resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6584179A JPS55157736A (en) 1979-05-28 1979-05-28 Ionized radiation sensitive negative type resist

Publications (2)

Publication Number Publication Date
JPS55157736A JPS55157736A (en) 1980-12-08
JPS6131857B2 true JPS6131857B2 (cg-RX-API-DMAC7.html) 1986-07-23

Family

ID=13298635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6584179A Granted JPS55157736A (en) 1979-05-28 1979-05-28 Ionized radiation sensitive negative type resist

Country Status (1)

Country Link
JP (1) JPS55157736A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS55157736A (en) 1980-12-08

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