JPS6130813Y2 - - Google Patents
Info
- Publication number
- JPS6130813Y2 JPS6130813Y2 JP7867581U JP7867581U JPS6130813Y2 JP S6130813 Y2 JPS6130813 Y2 JP S6130813Y2 JP 7867581 U JP7867581 U JP 7867581U JP 7867581 U JP7867581 U JP 7867581U JP S6130813 Y2 JPS6130813 Y2 JP S6130813Y2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- load
- tension
- rod
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 14
- 239000000523 sample Substances 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7867581U JPS6130813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-29 | 1981-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7867581U JPS6130813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-29 | 1981-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57189813U JPS57189813U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-12-02 |
| JPS6130813Y2 true JPS6130813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-09 |
Family
ID=29874297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7867581U Expired JPS6130813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-05-29 | 1981-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2750327B2 (ja) * | 1991-02-26 | 1998-05-13 | 住友シチックス株式会社 | 内周刃砥石の張力測定方法とその装置 |
-
1981
- 1981-05-29 JP JP7867581U patent/JPS6130813Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57189813U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1982-12-02 |