JPS6130285Y2 - - Google Patents
Info
- Publication number
- JPS6130285Y2 JPS6130285Y2 JP6278482U JP6278482U JPS6130285Y2 JP S6130285 Y2 JPS6130285 Y2 JP S6130285Y2 JP 6278482 U JP6278482 U JP 6278482U JP 6278482 U JP6278482 U JP 6278482U JP S6130285 Y2 JPS6130285 Y2 JP S6130285Y2
- Authority
- JP
- Japan
- Prior art keywords
- roller
- wafer
- driven roller
- end surface
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6278482U JPS58166035U (ja) | 1982-04-29 | 1982-04-29 | ウエハの位置決め装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6278482U JPS58166035U (ja) | 1982-04-29 | 1982-04-29 | ウエハの位置決め装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58166035U JPS58166035U (ja) | 1983-11-05 |
JPS6130285Y2 true JPS6130285Y2 (de) | 1986-09-05 |
Family
ID=30072918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6278482U Granted JPS58166035U (ja) | 1982-04-29 | 1982-04-29 | ウエハの位置決め装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58166035U (de) |
-
1982
- 1982-04-29 JP JP6278482U patent/JPS58166035U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58166035U (ja) | 1983-11-05 |
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