JPS6130069U - 被膜形成装置 - Google Patents

被膜形成装置

Info

Publication number
JPS6130069U
JPS6130069U JP11274584U JP11274584U JPS6130069U JP S6130069 U JPS6130069 U JP S6130069U JP 11274584 U JP11274584 U JP 11274584U JP 11274584 U JP11274584 U JP 11274584U JP S6130069 U JPS6130069 U JP S6130069U
Authority
JP
Japan
Prior art keywords
ion plating
film forming
evaporation source
forming device
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11274584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121974Y2 (https=
Inventor
松雄 岸
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP11274584U priority Critical patent/JPS6130069U/ja
Publication of JPS6130069U publication Critical patent/JPS6130069U/ja
Application granted granted Critical
Publication of JPH0121974Y2 publication Critical patent/JPH0121974Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11274584U 1984-07-25 1984-07-25 被膜形成装置 Granted JPS6130069U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11274584U JPS6130069U (ja) 1984-07-25 1984-07-25 被膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11274584U JPS6130069U (ja) 1984-07-25 1984-07-25 被膜形成装置

Publications (2)

Publication Number Publication Date
JPS6130069U true JPS6130069U (ja) 1986-02-22
JPH0121974Y2 JPH0121974Y2 (https=) 1989-06-29

Family

ID=30671782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11274584U Granted JPS6130069U (ja) 1984-07-25 1984-07-25 被膜形成装置

Country Status (1)

Country Link
JP (1) JPS6130069U (https=)

Also Published As

Publication number Publication date
JPH0121974Y2 (https=) 1989-06-29

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