JPS6129724Y2 - - Google Patents

Info

Publication number
JPS6129724Y2
JPS6129724Y2 JP5352281U JP5352281U JPS6129724Y2 JP S6129724 Y2 JPS6129724 Y2 JP S6129724Y2 JP 5352281 U JP5352281 U JP 5352281U JP 5352281 U JP5352281 U JP 5352281U JP S6129724 Y2 JPS6129724 Y2 JP S6129724Y2
Authority
JP
Japan
Prior art keywords
grid
etching apparatus
present
ion etching
grids
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5352281U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57167767U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5352281U priority Critical patent/JPS6129724Y2/ja
Publication of JPS57167767U publication Critical patent/JPS57167767U/ja
Application granted granted Critical
Publication of JPS6129724Y2 publication Critical patent/JPS6129724Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP5352281U 1981-04-14 1981-04-14 Expired JPS6129724Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5352281U JPS6129724Y2 (https=) 1981-04-14 1981-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5352281U JPS6129724Y2 (https=) 1981-04-14 1981-04-14

Publications (2)

Publication Number Publication Date
JPS57167767U JPS57167767U (https=) 1982-10-22
JPS6129724Y2 true JPS6129724Y2 (https=) 1986-09-01

Family

ID=29850158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5352281U Expired JPS6129724Y2 (https=) 1981-04-14 1981-04-14

Country Status (1)

Country Link
JP (1) JPS6129724Y2 (https=)

Also Published As

Publication number Publication date
JPS57167767U (https=) 1982-10-22

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