JPS61291630A - 真空処理方法および装置 - Google Patents

真空処理方法および装置

Info

Publication number
JPS61291630A
JPS61291630A JP13152885A JP13152885A JPS61291630A JP S61291630 A JPS61291630 A JP S61291630A JP 13152885 A JP13152885 A JP 13152885A JP 13152885 A JP13152885 A JP 13152885A JP S61291630 A JPS61291630 A JP S61291630A
Authority
JP
Japan
Prior art keywords
vacuum
chamber
vacuum processing
chambers
preliminary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13152885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250134B2 (enrdf_load_stackoverflow
Inventor
Hitoyoshi Nozaki
野崎　仁義
Hiroo Ebisawa
海老沢　宏夫
Hirobumi Hara
博文 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Priority to JP13152885A priority Critical patent/JPS61291630A/ja
Priority to GB8614578A priority patent/GB2178227B/en
Priority to US06/874,934 priority patent/US4733746A/en
Priority to CA000511762A priority patent/CA1283369C/en
Publication of JPS61291630A publication Critical patent/JPS61291630A/ja
Publication of JPH0250134B2 publication Critical patent/JPH0250134B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP13152885A 1985-06-17 1985-06-17 真空処理方法および装置 Granted JPS61291630A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13152885A JPS61291630A (ja) 1985-06-17 1985-06-17 真空処理方法および装置
GB8614578A GB2178227B (en) 1985-06-17 1986-06-16 Vacuum treating method and apparatus
US06/874,934 US4733746A (en) 1985-06-17 1986-06-16 Vacuum treating method and apparatus
CA000511762A CA1283369C (en) 1985-06-17 1986-06-17 Vacuum treating method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13152885A JPS61291630A (ja) 1985-06-17 1985-06-17 真空処理方法および装置

Publications (2)

Publication Number Publication Date
JPS61291630A true JPS61291630A (ja) 1986-12-22
JPH0250134B2 JPH0250134B2 (enrdf_load_stackoverflow) 1990-11-01

Family

ID=15060174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13152885A Granted JPS61291630A (ja) 1985-06-17 1985-06-17 真空処理方法および装置

Country Status (1)

Country Link
JP (1) JPS61291630A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6469205A (en) * 1987-09-08 1989-03-15 Sumitomo Electric Industries Levitation type transfer device
CN113443617A (zh) * 2021-08-19 2021-09-28 陕西六元碳晶股份有限公司 一种连续式碳纳米管的纯化装置及工艺

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6469205A (en) * 1987-09-08 1989-03-15 Sumitomo Electric Industries Levitation type transfer device
CN113443617A (zh) * 2021-08-19 2021-09-28 陕西六元碳晶股份有限公司 一种连续式碳纳米管的纯化装置及工艺

Also Published As

Publication number Publication date
JPH0250134B2 (enrdf_load_stackoverflow) 1990-11-01

Similar Documents

Publication Publication Date Title
JP4386832B2 (ja) Ｃｖｄコーティング用の回転装置
JPS61291630A (ja) 真空処理方法および装置
JPS62535A (ja) 連続式プラズマ処理装置
US20040089227A1 (en) Dual chamber vacuum processing system
JP2010089014A (ja) プラズマ洗浄装置
US4733746A (en) Vacuum treating method and apparatus
JPH07325279A (ja) 減圧処理装置及び方法
JPS61291631A (ja) 真空処理方法および装置
JPS5877239A (ja) 連続式真空処理装置
JP4798288B2 (ja) 蒸着装置
US6123494A (en) Process for the loading and unloading of an evacuatable treatment chamber and handling device for carrying out the process
JPH0325276A (ja) 連続真空乾燥装置
JPS60115227A (ja) プラズマ等の処理方法とその装置
JP3388654B2 (ja) 真空処理方法と装置
JPS63307273A (ja) 基板に薄層をスパツタする装置
JPS60250038A (ja) 合成樹脂製品の塗装前処理方法および装置
JP2002194552A (ja) プラズマ処理装置及びプラズマ処理方法
JPH05237362A (ja) 処理装置
JP4392073B2 (ja) 成膜装置
JPS61227184A (ja) プラズマエツチング装置
JP5598407B2 (ja) 成膜処理装置および成膜方法
JPH01308436A (ja) プラズマ処理装置
JP2650043B2 (ja) インライン式真空発泡冷却装置
JPH069019Y2 (ja) Ｃｖｄ装置
JPH04241914A (ja) 真空樹脂注型装置