JPS61285382A - 窒化ホウ素るつぼ及びその製法 - Google Patents
窒化ホウ素るつぼ及びその製法Info
- Publication number
- JPS61285382A JPS61285382A JP12523085A JP12523085A JPS61285382A JP S61285382 A JPS61285382 A JP S61285382A JP 12523085 A JP12523085 A JP 12523085A JP 12523085 A JP12523085 A JP 12523085A JP S61285382 A JPS61285382 A JP S61285382A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- wall
- thickness
- growth rate
- boron nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 19
- 229910052582 BN Inorganic materials 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000002994 raw material Substances 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 3
- -1 boron halide Chemical class 0.000 claims description 3
- 238000000034 method Methods 0.000 description 22
- 239000010410 layer Substances 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 150000001875 compounds Chemical class 0.000 description 11
- 239000013078 crystal Substances 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000032798 delamination Effects 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 244000175448 Citrus madurensis Species 0.000 description 1
- 235000017317 Fortunella Nutrition 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 241000446313 Lamella Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12523085A JPS61285382A (ja) | 1985-06-11 | 1985-06-11 | 窒化ホウ素るつぼ及びその製法 |
| US06/866,823 US4773852A (en) | 1985-06-11 | 1986-05-22 | Pyrolytic boron nitride crucible and method for producing the same |
| DE8686107961T DE3668162D1 (de) | 1985-06-11 | 1986-06-11 | Tiegel aus pyrolytischem bornitrid und verfahren zu seiner herstellung. |
| EP86107961A EP0206120B1 (en) | 1985-06-11 | 1986-06-11 | Pyrolytic boron nitride crucible and method for producing the same |
| US07/319,902 US4913652A (en) | 1985-06-11 | 1989-03-03 | Pyrolytic boron nitride crucible and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12523085A JPS61285382A (ja) | 1985-06-11 | 1985-06-11 | 窒化ホウ素るつぼ及びその製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61285382A true JPS61285382A (ja) | 1986-12-16 |
| JPH0455159B2 JPH0455159B2 (enrdf_load_stackoverflow) | 1992-09-02 |
Family
ID=14905038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12523085A Granted JPS61285382A (ja) | 1985-06-11 | 1985-06-11 | 窒化ホウ素るつぼ及びその製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61285382A (enrdf_load_stackoverflow) |
-
1985
- 1985-06-11 JP JP12523085A patent/JPS61285382A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0455159B2 (enrdf_load_stackoverflow) | 1992-09-02 |
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