JPS61283107A - パ−マロイ軟磁性膜の製造方法 - Google Patents
パ−マロイ軟磁性膜の製造方法Info
- Publication number
- JPS61283107A JPS61283107A JP12552485A JP12552485A JPS61283107A JP S61283107 A JPS61283107 A JP S61283107A JP 12552485 A JP12552485 A JP 12552485A JP 12552485 A JP12552485 A JP 12552485A JP S61283107 A JPS61283107 A JP S61283107A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- permalloy
- voltage
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000889 permalloy Inorganic materials 0.000 title claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000004544 sputter deposition Methods 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000011261 inert gas Substances 0.000 claims abstract description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 40
- 239000007789 gas Substances 0.000 abstract description 21
- 229910052786 argon Inorganic materials 0.000 abstract description 20
- 230000007423 decrease Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 51
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12552485A JPS61283107A (ja) | 1985-06-10 | 1985-06-10 | パ−マロイ軟磁性膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12552485A JPS61283107A (ja) | 1985-06-10 | 1985-06-10 | パ−マロイ軟磁性膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61283107A true JPS61283107A (ja) | 1986-12-13 |
| JPH0337849B2 JPH0337849B2 (enrdf_load_stackoverflow) | 1991-06-06 |
Family
ID=14912296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12552485A Granted JPS61283107A (ja) | 1985-06-10 | 1985-06-10 | パ−マロイ軟磁性膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61283107A (enrdf_load_stackoverflow) |
-
1985
- 1985-06-10 JP JP12552485A patent/JPS61283107A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0337849B2 (enrdf_load_stackoverflow) | 1991-06-06 |
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