JPS6128167B2 - - Google Patents

Info

Publication number

JPS6128167B2

JPS6128167B2 JP10945477A JP10945477A JPS6128167B2 JP S6128167 B2 JPS6128167 B2 JP S6128167B2 JP 10945477 A JP10945477 A JP 10945477A JP 10945477 A JP10945477 A JP 10945477A JP S6128167 B2 JPS6128167 B2 JP S6128167B2

Authority

JP

Japan

Prior art keywords

particles

support

tape

head

cleaning

Prior art date

1977-09-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000002245 particle Substances 0.000 claims description 57
• 238000009826 distribution Methods 0.000 claims description 3
• 239000011230 binding agent Substances 0.000 claims description 2
• 238000004140 cleaning Methods 0.000 description 18
• 230000000694 effects Effects 0.000 description 8
• 238000000034 method Methods 0.000 description 8
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
• 230000000052 comparative effect Effects 0.000 description 5
• -1 polyethylene Polymers 0.000 description 5
• 238000007788 roughening Methods 0.000 description 5
• 238000002834 transmittance Methods 0.000 description 5
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
• 238000007664 blowing Methods 0.000 description 4
• 230000000717 retained effect Effects 0.000 description 4
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
• 239000011362 coarse particle Substances 0.000 description 3
• 239000010410 layer Substances 0.000 description 3
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
• 239000005020 polyethylene terephthalate Substances 0.000 description 3
• 229920000139 polyethylene terephthalate Polymers 0.000 description 3
• 239000000843 powder Substances 0.000 description 3
• 239000007921 spray Substances 0.000 description 3
• 238000005507 spraying Methods 0.000 description 3
• 239000000725 suspension Substances 0.000 description 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
• 239000004952 Polyamide Substances 0.000 description 2
• 239000004698 Polyethylene Substances 0.000 description 2
• 229910004298 SiO 2 Inorganic materials 0.000 description 2
• 239000000945 filler Substances 0.000 description 2
• 230000003287 optical effect Effects 0.000 description 2
• 239000004033 plastic Substances 0.000 description 2
• 229920003023 plastic Polymers 0.000 description 2
• 229920002647 polyamide Polymers 0.000 description 2
• 229920000573 polyethylene Polymers 0.000 description 2
• 239000004576 sand Substances 0.000 description 2
• 238000005488 sandblasting Methods 0.000 description 2
• 239000000377 silicon dioxide Substances 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• 229910002706 AlOOH Inorganic materials 0.000 description 1
• 229910017119 AlPO Inorganic materials 0.000 description 1
• 229920002284 Cellulose triacetate Polymers 0.000 description 1
• 229920000742 Cotton Polymers 0.000 description 1
• CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
• 229910020068 MgAl Inorganic materials 0.000 description 1
• 239000004642 Polyimide Substances 0.000 description 1
• 229910006501 ZrSiO Inorganic materials 0.000 description 1
• NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
• 238000005299 abrasion Methods 0.000 description 1
• 229910052656 albite Inorganic materials 0.000 description 1
• ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 1
• OJMOMXZKOWKUTA-UHFFFAOYSA-N aluminum;borate Chemical compound [Al+3].[O-]B([O-])[O-] OJMOMXZKOWKUTA-UHFFFAOYSA-N 0.000 description 1
• INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
• 229910000420 cerium oxide Inorganic materials 0.000 description 1
• 238000003486 chemical etching Methods 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 239000011247 coating layer Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• 239000010432 diamond Substances 0.000 description 1
• 229910003460 diamond Inorganic materials 0.000 description 1
• QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
• 238000001035 drying Methods 0.000 description 1
• 238000005530 etching Methods 0.000 description 1
• 229910052598 goethite Inorganic materials 0.000 description 1
• AEIXRCIKZIZYPM-UHFFFAOYSA-M hydroxy(oxo)iron Chemical compound [O][Fe]O AEIXRCIKZIZYPM-UHFFFAOYSA-M 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• 229910052664 nepheline Inorganic materials 0.000 description 1
• 239000010434 nepheline Substances 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 230000001151 other effect Effects 0.000 description 1
• BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
• RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
• 239000013618 particulate matter Substances 0.000 description 1
• 238000005498 polishing Methods 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 229920000915 polyvinyl chloride Polymers 0.000 description 1
• 239000004800 polyvinyl chloride Substances 0.000 description 1
• 238000003825 pressing Methods 0.000 description 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
• 229910010271 silicon carbide Inorganic materials 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1
• 229910052596 spinel Inorganic materials 0.000 description 1
• 239000011029 spinel Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 230000003746 surface roughness Effects 0.000 description 1
• 238000010408 sweeping Methods 0.000 description 1
• 229920001169 thermoplastic Polymers 0.000 description 1
• 239000004416 thermosoftening plastic Substances 0.000 description 1
• XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
• 229910001887 tin oxide Inorganic materials 0.000 description 1
• OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
• UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
• 238000005406 washing Methods 0.000 description 1
• 229910052845 zircon Inorganic materials 0.000 description 1
• 229910001928 zirconium oxide Inorganic materials 0.000 description 1
• GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
• 229910006540 α-FeOOH Inorganic materials 0.000 description 1

Cited By (2)