JPS6127967Y2 - - Google Patents
Info
- Publication number
- JPS6127967Y2 JPS6127967Y2 JP6496282U JP6496282U JPS6127967Y2 JP S6127967 Y2 JPS6127967 Y2 JP S6127967Y2 JP 6496282 U JP6496282 U JP 6496282U JP 6496282 U JP6496282 U JP 6496282U JP S6127967 Y2 JPS6127967 Y2 JP S6127967Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- monitoring
- workpiece
- shutter
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 50
- 238000012544 monitoring process Methods 0.000 claims description 32
- 230000008020 evaporation Effects 0.000 claims description 15
- 238000001704 evaporation Methods 0.000 claims description 15
- 239000010408 film Substances 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 5
- 239000002356 single layer Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000012806 monitoring device Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6496282U JPS58168564U (ja) | 1982-05-06 | 1982-05-06 | 連続薄膜形成装置における膜厚監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6496282U JPS58168564U (ja) | 1982-05-06 | 1982-05-06 | 連続薄膜形成装置における膜厚監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58168564U JPS58168564U (ja) | 1983-11-10 |
| JPS6127967Y2 true JPS6127967Y2 (cg-RX-API-DMAC7.html) | 1986-08-20 |
Family
ID=30074969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6496282U Granted JPS58168564U (ja) | 1982-05-06 | 1982-05-06 | 連続薄膜形成装置における膜厚監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58168564U (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS602664A (ja) * | 1983-06-16 | 1985-01-08 | Matsushita Electric Ind Co Ltd | 薄膜製造装置 |
-
1982
- 1982-05-06 JP JP6496282U patent/JPS58168564U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58168564U (ja) | 1983-11-10 |
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