JPS6127967Y2 - - Google Patents

Info

Publication number
JPS6127967Y2
JPS6127967Y2 JP6496282U JP6496282U JPS6127967Y2 JP S6127967 Y2 JPS6127967 Y2 JP S6127967Y2 JP 6496282 U JP6496282 U JP 6496282U JP 6496282 U JP6496282 U JP 6496282U JP S6127967 Y2 JPS6127967 Y2 JP S6127967Y2
Authority
JP
Japan
Prior art keywords
thin film
monitoring
workpiece
shutter
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6496282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58168564U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6496282U priority Critical patent/JPS58168564U/ja
Publication of JPS58168564U publication Critical patent/JPS58168564U/ja
Application granted granted Critical
Publication of JPS6127967Y2 publication Critical patent/JPS6127967Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6496282U 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置 Granted JPS58168564U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6496282U JPS58168564U (ja) 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6496282U JPS58168564U (ja) 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置

Publications (2)

Publication Number Publication Date
JPS58168564U JPS58168564U (ja) 1983-11-10
JPS6127967Y2 true JPS6127967Y2 (cg-RX-API-DMAC7.html) 1986-08-20

Family

ID=30074969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6496282U Granted JPS58168564U (ja) 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置

Country Status (1)

Country Link
JP (1) JPS58168564U (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602664A (ja) * 1983-06-16 1985-01-08 Matsushita Electric Ind Co Ltd 薄膜製造装置

Also Published As

Publication number Publication date
JPS58168564U (ja) 1983-11-10

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