JPS58168564U - 連続薄膜形成装置における膜厚監視装置 - Google Patents

連続薄膜形成装置における膜厚監視装置

Info

Publication number
JPS58168564U
JPS58168564U JP6496282U JP6496282U JPS58168564U JP S58168564 U JPS58168564 U JP S58168564U JP 6496282 U JP6496282 U JP 6496282U JP 6496282 U JP6496282 U JP 6496282U JP S58168564 U JPS58168564 U JP S58168564U
Authority
JP
Japan
Prior art keywords
thin film
monitoring device
forming equipment
continuous thin
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6496282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127967Y2 (cg-RX-API-DMAC7.html
Inventor
昭彦 悳
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP6496282U priority Critical patent/JPS58168564U/ja
Publication of JPS58168564U publication Critical patent/JPS58168564U/ja
Application granted granted Critical
Publication of JPS6127967Y2 publication Critical patent/JPS6127967Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6496282U 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置 Granted JPS58168564U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6496282U JPS58168564U (ja) 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6496282U JPS58168564U (ja) 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置

Publications (2)

Publication Number Publication Date
JPS58168564U true JPS58168564U (ja) 1983-11-10
JPS6127967Y2 JPS6127967Y2 (cg-RX-API-DMAC7.html) 1986-08-20

Family

ID=30074969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6496282U Granted JPS58168564U (ja) 1982-05-06 1982-05-06 連続薄膜形成装置における膜厚監視装置

Country Status (1)

Country Link
JP (1) JPS58168564U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602664A (ja) * 1983-06-16 1985-01-08 Matsushita Electric Ind Co Ltd 薄膜製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602664A (ja) * 1983-06-16 1985-01-08 Matsushita Electric Ind Co Ltd 薄膜製造装置

Also Published As

Publication number Publication date
JPS6127967Y2 (cg-RX-API-DMAC7.html) 1986-08-20

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