JPS58168564U - Film thickness monitoring device for continuous thin film forming equipment - Google Patents
Film thickness monitoring device for continuous thin film forming equipmentInfo
- Publication number
- JPS58168564U JPS58168564U JP6496282U JP6496282U JPS58168564U JP S58168564 U JPS58168564 U JP S58168564U JP 6496282 U JP6496282 U JP 6496282U JP 6496282 U JP6496282 U JP 6496282U JP S58168564 U JPS58168564 U JP S58168564U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- monitoring device
- forming equipment
- continuous thin
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 8
- 239000010408 film Substances 0.000 title claims 2
- 238000012806 monitoring device Methods 0.000 title claims 2
- 238000012544 monitoring process Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案装置の１例の斜視図、第２図はその裁断
側面図、第３図はシャッタの変形例の斜視図、第４図は
監視用薄膜の形成例の線図である。
１・・・被加工物、２・・・蒸発源、３・・・薄膜、４
・・・投受光器、５・・・監視帯、６・・・シャッタ、
７・・・監視用薄膜。Fig. 1 is a perspective view of one example of the device of the present invention, Fig. 2 is a cut side view thereof, Fig. 3 is a perspective view of a modified example of the shutter, and Fig. 4 is a line diagram of an example of forming a monitoring thin film. . 1... Workpiece, 2... Evaporation source, 3... Thin film, 4
...Emitter/receiver, 5...Monitoring zone, 6...Shutter,
7... Thin film for monitoring.
Claims (1)
膜３を形成すると共に投受光器４により該薄膜３の膜厚
を監視する式のも姐こ於て、該被加工物１の一側を監視
帯５とし、これに耐着する蒸発源２からの蒸発物質を開
閉自在のシャッタ６により制御して単層の間歇的な監視
用薄膜７を形成するようにして成る連続薄膜形成装置に
おける膜厚監視装置。In this method, a long workpiece 1 is transferred over an evaporation source 2, a thin film 3 is formed thereon, and the thickness of the thin film 3 is monitored by a light emitter/receiver 4. One side of the object 1 is set as a monitoring band 5, and the evaporated material from the evaporation source 2 adhering to the monitoring band 5 is controlled by a shutter 6 which can be opened and closed to form an intermittent single-layer monitoring thin film 7. Film thickness monitoring device for continuous thin film forming equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6496282U JPS58168564U (en) | 1982-05-06 | 1982-05-06 | Film thickness monitoring device for continuous thin film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6496282U JPS58168564U (en) | 1982-05-06 | 1982-05-06 | Film thickness monitoring device for continuous thin film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58168564U true JPS58168564U (en) | 1983-11-10 |
| JPS6127967Y2 JPS6127967Y2 (en) | 1986-08-20 |
Family
ID=30074969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6496282U Granted JPS58168564U (en) | 1982-05-06 | 1982-05-06 | Film thickness monitoring device for continuous thin film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58168564U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS602664A (en) * | 1983-06-16 | 1985-01-08 | Matsushita Electric Ind Co Ltd | Thin film manufacturing equipment |
-
1982
- 1982-05-06 JP JP6496282U patent/JPS58168564U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS602664A (en) * | 1983-06-16 | 1985-01-08 | Matsushita Electric Ind Co Ltd | Thin film manufacturing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6127967Y2 (en) | 1986-08-20 |
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