JPS6154598B2 - - Google Patents
Info
- Publication number
- JPS6154598B2 JPS6154598B2 JP57039337A JP3933782A JPS6154598B2 JP S6154598 B2 JPS6154598 B2 JP S6154598B2 JP 57039337 A JP57039337 A JP 57039337A JP 3933782 A JP3933782 A JP 3933782A JP S6154598 B2 JPS6154598 B2 JP S6154598B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- workpiece
- opening
- monitoring
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039337A JPS58158255A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039337A JPS58158255A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158255A JPS58158255A (ja) | 1983-09-20 |
| JPS6154598B2 true JPS6154598B2 (cg-RX-API-DMAC7.html) | 1986-11-22 |
Family
ID=12550273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57039337A Granted JPS58158255A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158255A (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016221529A1 (de) | 2016-11-03 | 2018-05-03 | Koenig & Bauer Ag | Laminierungsmaschine |
| DE102016221527A1 (de) * | 2016-11-03 | 2018-05-03 | Koenig & Bauer Ag | Laminierungsmaschine mit Einziehmittel und ein Verfahren zum Laminieren eines Materials |
| DE102016221530A1 (de) | 2016-11-03 | 2018-05-03 | Koenig & Bauer Ag | Laminierungsmaschine und ein Verfahren zum Laminieren von Bogen eines Materials |
-
1982
- 1982-03-15 JP JP57039337A patent/JPS58158255A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58158255A (ja) | 1983-09-20 |
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