JPS58158255A - 多層薄膜形成装置における膜厚監視装置 - Google Patents
多層薄膜形成装置における膜厚監視装置Info
- Publication number
- JPS58158255A JPS58158255A JP57039337A JP3933782A JPS58158255A JP S58158255 A JPS58158255 A JP S58158255A JP 57039337 A JP57039337 A JP 57039337A JP 3933782 A JP3933782 A JP 3933782A JP S58158255 A JPS58158255 A JP S58158255A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- workpiece
- monitoring
- multilayer thin
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 34
- 239000010408 film Substances 0.000 title claims description 13
- 230000008020 evaporation Effects 0.000 claims description 26
- 238000001704 evaporation Methods 0.000 claims description 25
- 238000012544 monitoring process Methods 0.000 claims description 19
- 238000012806 monitoring device Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039337A JPS58158255A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039337A JPS58158255A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158255A true JPS58158255A (ja) | 1983-09-20 |
| JPS6154598B2 JPS6154598B2 (cg-RX-API-DMAC7.html) | 1986-11-22 |
Family
ID=12550273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57039337A Granted JPS58158255A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158255A (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019531995A (ja) * | 2016-11-03 | 2019-11-07 | ケーニッヒ ウント バウアー アー・ゲーＫｏｅｎｉｇ ＆ Ｂａｕｅｒ ＡＧ | 引込手段を備えるラミネータおよび材料をラミネートする方法 |
| JP2019535612A (ja) * | 2016-11-03 | 2019-12-12 | ケーニッヒ ウント バウアー アー・ゲーＫｏｅｎｉｇ ＆ Ｂａｕｅｒ ＡＧ | ラミネータおよび材料のシートをラミネートする方法 |
| JP2020513344A (ja) * | 2016-11-03 | 2020-05-14 | ケーニッヒ ウント バウアー アー・ゲーＫｏｅｎｉｇ ＆ Ｂａｕｅｒ ＡＧ | ラミネータ |
-
1982
- 1982-03-15 JP JP57039337A patent/JPS58158255A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019531995A (ja) * | 2016-11-03 | 2019-11-07 | ケーニッヒ ウント バウアー アー・ゲーＫｏｅｎｉｇ ＆ Ｂａｕｅｒ ＡＧ | 引込手段を備えるラミネータおよび材料をラミネートする方法 |
| JP2019535612A (ja) * | 2016-11-03 | 2019-12-12 | ケーニッヒ ウント バウアー アー・ゲーＫｏｅｎｉｇ ＆ Ｂａｕｅｒ ＡＧ | ラミネータおよび材料のシートをラミネートする方法 |
| JP2020513344A (ja) * | 2016-11-03 | 2020-05-14 | ケーニッヒ ウント バウアー アー・ゲーＫｏｅｎｉｇ ＆ Ｂａｕｅｒ ＡＧ | ラミネータ |
| US10717258B2 (en) | 2016-11-03 | 2020-07-21 | Koenig & Bauer Ag | Laminating machine, and a method for laminating sheets of a material |
| US10821716B2 (en) | 2016-11-03 | 2020-11-03 | Koenig & Bauer Ag | Laminating machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6154598B2 (cg-RX-API-DMAC7.html) | 1986-11-22 |
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