JPS61274222A - 流量センサ - Google Patents

流量センサ

Info

Publication number
JPS61274222A
JPS61274222A JP60119103A JP11910385A JPS61274222A JP S61274222 A JPS61274222 A JP S61274222A JP 60119103 A JP60119103 A JP 60119103A JP 11910385 A JP11910385 A JP 11910385A JP S61274222 A JPS61274222 A JP S61274222A
Authority
JP
Japan
Prior art keywords
resistance
temperature
thin film
fluid
platinum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60119103A
Other languages
English (en)
Japanese (ja)
Inventor
Junichi Tanaka
潤一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP60119103A priority Critical patent/JPS61274222A/ja
Priority to DE19863617770 priority patent/DE3617770A1/de
Priority to GB08613053A priority patent/GB2177212A/en
Publication of JPS61274222A publication Critical patent/JPS61274222A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP60119103A 1985-05-30 1985-05-30 流量センサ Pending JPS61274222A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60119103A JPS61274222A (ja) 1985-05-30 1985-05-30 流量センサ
DE19863617770 DE3617770A1 (de) 1985-05-30 1986-05-27 Thermischer durchfluss-sensor
GB08613053A GB2177212A (en) 1985-05-30 1986-05-29 Flow sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60119103A JPS61274222A (ja) 1985-05-30 1985-05-30 流量センサ

Publications (1)

Publication Number Publication Date
JPS61274222A true JPS61274222A (ja) 1986-12-04

Family

ID=14752978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60119103A Pending JPS61274222A (ja) 1985-05-30 1985-05-30 流量センサ

Country Status (3)

Country Link
JP (1) JPS61274222A (enrdf_load_stackoverflow)
DE (1) DE3617770A1 (enrdf_load_stackoverflow)
GB (1) GB2177212A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63307315A (ja) * 1987-06-09 1988-12-15 Hitachi Ltd ホツトフイルム形空気流量計
US4876887A (en) * 1988-06-27 1989-10-31 Mickler Brian E Thermal flux mass flowmeter
DE3843746C1 (enrdf_load_stackoverflow) * 1988-12-24 1990-07-12 Degussa Ag, 6000 Frankfurt, De
DE9006967U1 (de) * 1990-06-22 1991-10-24 Sensycon Gesellschaft für industrielle Sensorsysteme und Prozessleittechnik mbH, 30179 Hannover Widerstandselement
JP2641333B2 (ja) * 1991-03-13 1997-08-13 日本碍子株式会社 熱式流量センサ
DE4130099C2 (de) * 1991-09-11 1996-07-18 Auergesellschaft Gmbh Verfahren und eine Vorrichtung zum Feststellen des Vorliegens eines durch eine Meßkammer eines Gasmeßgerätes geförderten Meßgasstromes
DE4130513C2 (de) * 1991-09-13 1996-10-24 Pierburg Ag Temperaturregler
GB2337818A (en) * 1998-05-26 1999-12-01 Caradon Plumbing Limited Detecting fluid flow at ambient temperatures
DE102010018948B4 (de) 2010-04-30 2018-08-16 Abb Schweiz Ag Thermischer Massendurchflussmesser mit zusätzlichen Sensormitteln sowie Verfahren zum Betrieb desselben

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB839615A (en) * 1958-07-28 1960-06-29 Godart Mijnhardt N V Improvements in or relating to a device for measuring the velocity of a gas or the concentration of a gas in a gas mixture
CH510873A (de) * 1969-07-08 1971-07-31 Mettler Instrumente Ag Elektrisches Widerstandsthermometer
DE2728060A1 (de) * 1977-06-22 1979-01-18 Bosch Gmbh Robert Messonde mit temperaturabhaengigem widerstand zur mengenmessung
DE2804850C2 (de) * 1978-02-04 1983-11-17 Degussa Ag, 6000 Frankfurt Vorrichtung zur Messung der Strömungsgeschwindigkeit von Gasen
DE2919433C2 (de) * 1979-05-15 1987-01-22 Robert Bosch Gmbh, 7000 Stuttgart Meßsonde zur Messung der Masse und/oder Temperatur eines strömenden Mediums
DE2925975A1 (de) * 1979-06-27 1981-01-15 Siemens Ag Mengendurchflussmesser
JPS56162014A (en) * 1980-05-16 1981-12-12 Nippon Denso Co Ltd Measuring device for flow rate of gas
DE3231345C3 (de) * 1982-08-24 1994-11-17 Bosch Gmbh Robert Verfahren zur Herstellung von Sonden zur Messung der Masse und/oder Temperatur eines strömenden Mediums
US4433576A (en) * 1982-09-20 1984-02-28 General Motors Corporation Mass airflow sensor
US4478077A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter

Also Published As

Publication number Publication date
DE3617770C2 (enrdf_load_stackoverflow) 1989-06-01
GB2177212A (en) 1987-01-14
GB8613053D0 (en) 1986-07-02
DE3617770A1 (de) 1986-12-04

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