GB2177212A - Flow sensor - Google Patents
Flow sensor Download PDFInfo
- Publication number
- GB2177212A GB2177212A GB08613053A GB8613053A GB2177212A GB 2177212 A GB2177212 A GB 2177212A GB 08613053 A GB08613053 A GB 08613053A GB 8613053 A GB8613053 A GB 8613053A GB 2177212 A GB2177212 A GB 2177212A
- Authority
- GB
- United Kingdom
- Prior art keywords
- fluid
- heating resistor
- resistor
- flow sensor
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012530 fluid Substances 0.000 claims abstract description 54
- 238000010438 heat treatment Methods 0.000 claims abstract description 47
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60119103A JPS61274222A (ja) | 1985-05-30 | 1985-05-30 | 流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB8613053D0 GB8613053D0 (en) | 1986-07-02 |
| GB2177212A true GB2177212A (en) | 1987-01-14 |
Family
ID=14752978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08613053A Withdrawn GB2177212A (en) | 1985-05-30 | 1986-05-29 | Flow sensor |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS61274222A (enrdf_load_stackoverflow) |
| DE (1) | DE3617770A1 (enrdf_load_stackoverflow) |
| GB (1) | GB2177212A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0294689A1 (en) * | 1987-06-09 | 1988-12-14 | Hitachi, Ltd. | Hot film type air flow meter |
| DE4207188A1 (de) * | 1991-03-13 | 1992-10-08 | Ngk Insulators Ltd | Stroemungsmengenfuehler thermischer bauart |
| DE4130513A1 (de) * | 1991-09-13 | 1993-03-18 | Pierburg Gmbh | Temperaturregler |
| US5251481A (en) * | 1990-06-22 | 1993-10-12 | Sensycon | Direct-intake air measuring apparatus |
| GB2337818A (en) * | 1998-05-26 | 1999-12-01 | Caradon Plumbing Limited | Detecting fluid flow at ambient temperatures |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4876887A (en) * | 1988-06-27 | 1989-10-31 | Mickler Brian E | Thermal flux mass flowmeter |
| DE3843746C1 (enrdf_load_stackoverflow) * | 1988-12-24 | 1990-07-12 | Degussa Ag, 6000 Frankfurt, De | |
| DE4130099C2 (de) * | 1991-09-11 | 1996-07-18 | Auergesellschaft Gmbh | Verfahren und eine Vorrichtung zum Feststellen des Vorliegens eines durch eine Meßkammer eines Gasmeßgerätes geförderten Meßgasstromes |
| DE102010018948B4 (de) | 2010-04-30 | 2018-08-16 | Abb Schweiz Ag | Thermischer Massendurchflussmesser mit zusätzlichen Sensormitteln sowie Verfahren zum Betrieb desselben |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB839615A (en) * | 1958-07-28 | 1960-06-29 | Godart Mijnhardt N V | Improvements in or relating to a device for measuring the velocity of a gas or the concentration of a gas in a gas mixture |
| GB2013898A (en) * | 1978-02-04 | 1979-08-15 | Degussa | Device for measuring the flow velocity of cases |
| GB1586948A (en) * | 1977-06-22 | 1981-03-25 | Bosch Gmbh Robert | Apparatus with temperature-dependent resistance for flow rate measurement |
| US4399698A (en) * | 1980-05-16 | 1983-08-23 | Nippondenso Co., Ltd. | Gas flow measuring apparatus |
| EP0106455A1 (en) * | 1982-09-20 | 1984-04-25 | General Motors Corporation | Mass airflow sensor |
| US4478077A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
| EP0137687A1 (en) * | 1983-08-26 | 1985-04-17 | Innovus | A thermal mass flow meter |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH510873A (de) * | 1969-07-08 | 1971-07-31 | Mettler Instrumente Ag | Elektrisches Widerstandsthermometer |
| DE2919433C2 (de) * | 1979-05-15 | 1987-01-22 | Robert Bosch Gmbh, 7000 Stuttgart | Meßsonde zur Messung der Masse und/oder Temperatur eines strömenden Mediums |
| DE2925975A1 (de) * | 1979-06-27 | 1981-01-15 | Siemens Ag | Mengendurchflussmesser |
| DE3231345C3 (de) * | 1982-08-24 | 1994-11-17 | Bosch Gmbh Robert | Verfahren zur Herstellung von Sonden zur Messung der Masse und/oder Temperatur eines strömenden Mediums |
-
1985
- 1985-05-30 JP JP60119103A patent/JPS61274222A/ja active Pending
-
1986
- 1986-05-27 DE DE19863617770 patent/DE3617770A1/de active Granted
- 1986-05-29 GB GB08613053A patent/GB2177212A/en not_active Withdrawn
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB839615A (en) * | 1958-07-28 | 1960-06-29 | Godart Mijnhardt N V | Improvements in or relating to a device for measuring the velocity of a gas or the concentration of a gas in a gas mixture |
| GB1586948A (en) * | 1977-06-22 | 1981-03-25 | Bosch Gmbh Robert | Apparatus with temperature-dependent resistance for flow rate measurement |
| GB2013898A (en) * | 1978-02-04 | 1979-08-15 | Degussa | Device for measuring the flow velocity of cases |
| US4399698A (en) * | 1980-05-16 | 1983-08-23 | Nippondenso Co., Ltd. | Gas flow measuring apparatus |
| EP0106455A1 (en) * | 1982-09-20 | 1984-04-25 | General Motors Corporation | Mass airflow sensor |
| US4478077A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
| EP0137687A1 (en) * | 1983-08-26 | 1985-04-17 | Innovus | A thermal mass flow meter |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0294689A1 (en) * | 1987-06-09 | 1988-12-14 | Hitachi, Ltd. | Hot film type air flow meter |
| US4829814A (en) * | 1987-06-09 | 1989-05-16 | Hitachi, Ltd. | Hot film type air flow meter |
| US5251481A (en) * | 1990-06-22 | 1993-10-12 | Sensycon | Direct-intake air measuring apparatus |
| DE4207188A1 (de) * | 1991-03-13 | 1992-10-08 | Ngk Insulators Ltd | Stroemungsmengenfuehler thermischer bauart |
| DE4130513A1 (de) * | 1991-09-13 | 1993-03-18 | Pierburg Gmbh | Temperaturregler |
| GB2337818A (en) * | 1998-05-26 | 1999-12-01 | Caradon Plumbing Limited | Detecting fluid flow at ambient temperatures |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3617770C2 (enrdf_load_stackoverflow) | 1989-06-01 |
| JPS61274222A (ja) | 1986-12-04 |
| GB8613053D0 (en) | 1986-07-02 |
| DE3617770A1 (de) | 1986-12-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |