JPS6127176Y2 - - Google Patents
Info
- Publication number
- JPS6127176Y2 JPS6127176Y2 JP5773178U JP5773178U JPS6127176Y2 JP S6127176 Y2 JPS6127176 Y2 JP S6127176Y2 JP 5773178 U JP5773178 U JP 5773178U JP 5773178 U JP5773178 U JP 5773178U JP S6127176 Y2 JPS6127176 Y2 JP S6127176Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressurized
- preliminary chamber
- reaction tube
- pressurized container
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 35
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 claims description 5
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000012546 transfer Methods 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 7
- 239000003302 ferromagnetic material Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5773178U JPS6127176Y2 (enrdf_load_stackoverflow) | 1978-04-28 | 1978-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5773178U JPS6127176Y2 (enrdf_load_stackoverflow) | 1978-04-28 | 1978-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54159968U JPS54159968U (enrdf_load_stackoverflow) | 1979-11-08 |
| JPS6127176Y2 true JPS6127176Y2 (enrdf_load_stackoverflow) | 1986-08-13 |
Family
ID=28955887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5773178U Expired JPS6127176Y2 (enrdf_load_stackoverflow) | 1978-04-28 | 1978-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127176Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3609077B1 (ja) * | 2003-07-09 | 2005-01-12 | 東京エレクトロン株式会社 | 高圧熱処理装置 |
-
1978
- 1978-04-28 JP JP5773178U patent/JPS6127176Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54159968U (enrdf_load_stackoverflow) | 1979-11-08 |
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