JPS6127042A - イオンビ−ム発生装置 - Google Patents
イオンビ−ム発生装置Info
- Publication number
- JPS6127042A JPS6127042A JP59149934A JP14993484A JPS6127042A JP S6127042 A JPS6127042 A JP S6127042A JP 59149934 A JP59149934 A JP 59149934A JP 14993484 A JP14993484 A JP 14993484A JP S6127042 A JPS6127042 A JP S6127042A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- substance
- synchrotron radiation
- state
- beam generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 title claims abstract description 36
- 239000000126 substance Substances 0.000 claims abstract description 31
- 230000005469 synchrotron radiation Effects 0.000 claims description 34
- 230000005281 excited state Effects 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000005283 ground state Effects 0.000 claims description 4
- 230000007935 neutral effect Effects 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims description 2
- 230000008016 vaporization Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 abstract description 25
- 229910052790 beryllium Inorganic materials 0.000 abstract description 24
- 229910001423 beryllium ion Inorganic materials 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 10
- 238000000752 ionisation method Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- PWOSZCQLSAMRQW-UHFFFAOYSA-N beryllium(2+) Chemical compound [Be+2] PWOSZCQLSAMRQW-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000609240 Ambelania acida Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010905 bagasse Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- -1 helium ions Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59149934A JPS6127042A (ja) | 1984-07-17 | 1984-07-17 | イオンビ−ム発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59149934A JPS6127042A (ja) | 1984-07-17 | 1984-07-17 | イオンビ−ム発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6127042A true JPS6127042A (ja) | 1986-02-06 |
| JPH0527214B2 JPH0527214B2 (enrdf_load_stackoverflow) | 1993-04-20 |
Family
ID=15485759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59149934A Granted JPS6127042A (ja) | 1984-07-17 | 1984-07-17 | イオンビ−ム発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127042A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5022999A (enrdf_load_stackoverflow) * | 1973-06-28 | 1975-03-12 |
-
1984
- 1984-07-17 JP JP59149934A patent/JPS6127042A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5022999A (enrdf_load_stackoverflow) * | 1973-06-28 | 1975-03-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527214B2 (enrdf_load_stackoverflow) | 1993-04-20 |
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