JPS6126921Y2 - - Google Patents
Info
- Publication number
- JPS6126921Y2 JPS6126921Y2 JP1977114210U JP11421077U JPS6126921Y2 JP S6126921 Y2 JPS6126921 Y2 JP S6126921Y2 JP 1977114210 U JP1977114210 U JP 1977114210U JP 11421077 U JP11421077 U JP 11421077U JP S6126921 Y2 JPS6126921 Y2 JP S6126921Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- sample surface
- focus detection
- optical microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 42
- 230000001360 synchronised effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977114210U JPS6126921Y2 (ko) | 1977-08-25 | 1977-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977114210U JPS6126921Y2 (ko) | 1977-08-25 | 1977-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5440132U JPS5440132U (ko) | 1979-03-16 |
| JPS6126921Y2 true JPS6126921Y2 (ko) | 1986-08-12 |
Family
ID=29064729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977114210U Expired JPS6126921Y2 (ko) | 1977-08-25 | 1977-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6126921Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS582726A (ja) * | 1981-06-30 | 1983-01-08 | Rigaku Denki Kogyo Kk | 液体螢光ｘ線分析装置における試料面決定方法 |
| JP3303916B2 (ja) * | 1987-11-30 | 2002-07-22 | 株式会社島津製作所 | 電子線マイクロアナライザの原理を用いた試料面マッピング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107733A (ko) * | 1973-02-16 | 1974-10-14 |
-
1977
- 1977-08-25 JP JP1977114210U patent/JPS6126921Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107733A (ko) * | 1973-02-16 | 1974-10-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5440132U (ko) | 1979-03-16 |
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