JPS61265397A - 流体駆動装置 - Google Patents

流体駆動装置

Info

Publication number
JPS61265397A
JPS61265397A JP60105089A JP10508985A JPS61265397A JP S61265397 A JPS61265397 A JP S61265397A JP 60105089 A JP60105089 A JP 60105089A JP 10508985 A JP10508985 A JP 10508985A JP S61265397 A JPS61265397 A JP S61265397A
Authority
JP
Japan
Prior art keywords
frequency
fluid
pressure sensor
driving
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60105089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0578679B2 (enrdf_load_stackoverflow
Inventor
Isao Inui
勲 乾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60105089A priority Critical patent/JPS61265397A/ja
Publication of JPS61265397A publication Critical patent/JPS61265397A/ja
Publication of JPH0578679B2 publication Critical patent/JPH0578679B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
  • Reciprocating Pumps (AREA)
JP60105089A 1985-05-17 1985-05-17 流体駆動装置 Granted JPS61265397A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60105089A JPS61265397A (ja) 1985-05-17 1985-05-17 流体駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60105089A JPS61265397A (ja) 1985-05-17 1985-05-17 流体駆動装置

Publications (2)

Publication Number Publication Date
JPS61265397A true JPS61265397A (ja) 1986-11-25
JPH0578679B2 JPH0578679B2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=14398188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60105089A Granted JPS61265397A (ja) 1985-05-17 1985-05-17 流体駆動装置

Country Status (1)

Country Link
JP (1) JPS61265397A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02283877A (ja) * 1989-04-21 1990-11-21 Mitsubishi Kasei Corp 振動子ポンプ及びその運転方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02283877A (ja) * 1989-04-21 1990-11-21 Mitsubishi Kasei Corp 振動子ポンプ及びその運転方法

Also Published As

Publication number Publication date
JPH0578679B2 (enrdf_load_stackoverflow) 1993-10-29

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