JPS61256923A - Production of pulverous perovskite type oxide powder - Google Patents

Production of pulverous perovskite type oxide powder

Info

Publication number
JPS61256923A
JPS61256923A JP60096541A JP9654185A JPS61256923A JP S61256923 A JPS61256923 A JP S61256923A JP 60096541 A JP60096541 A JP 60096541A JP 9654185 A JP9654185 A JP 9654185A JP S61256923 A JPS61256923 A JP S61256923A
Authority
JP
Japan
Prior art keywords
ethanol
precipitate
aqueous solution
oxalic acid
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60096541A
Other languages
Japanese (ja)
Other versions
JPH0249251B2 (en
Inventor
Hiroshi Yamamura
山村 博
Shigefumi Kuramoto
成史 倉本
Shinichi Shirasaki
信一 白崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Research in Inorganic Material
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP60096541A priority Critical patent/JPS61256923A/en
Publication of JPS61256923A publication Critical patent/JPS61256923A/en
Publication of JPH0249251B2 publication Critical patent/JPH0249251B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To easily produce the titled uniform pulverous powder having good crystallinity by brining an aq. soln. contg. ions of prescribed components into reaction with an excess oxalic acid in the presence of ethanol and decomposing thermally the precipitate obtd. with ammonia, etc., at high pH. CONSTITUTION:The aq. soln. contg. the constituting metallic element ions of the perovskite type oxide expressed by the general formula; PbZr1-xTixO3 (where 0<=x<=1.0) is brought into reaction with the excess oxalic acid of 10-25mol% of the total molar number of the above-mentioned ions in the presence of ethanol to form the precipitate. A basic gas or basic aq. soln. such as gaseous ammonia or aq. ammonia of which the oxalate such as ammonium oxalate formed by reacting with an oxalic acid is insoluble in an aq. ethanol soln. and is decomposed to evaporate by heating is thereafter brought into reaction with the aq. ethanol soln. contg. the above-mentioned borate. The resultant precipitate is theremally decomposed at about 600-800 deg.C after filtration and sepn., by which the pulverous perovskite type oxide powder having easy dispersibility is obtd.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はペロブスカイト型酸化物である一般式Pbzr
、−xTix03(ただし、XはO<、 x <1: 
1.0を現わす)で示される微粉末(以下PZTと略記
する)の製造法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to perovskite-type oxides of the general formula Pbzr.
, -xTix03 (where X is O<, x<1:
1.0) (hereinafter abbreviated as PZT).

PZTはそれ自身あるいは他のペロブスカイト型化合物
の固溶体の形で、コンデンサーなどの強誘電材料や圧電
体材料として広く使用されている材料である。
PZT, either by itself or in the form of a solid solution of other perovskite compounds, is a material that is widely used as a ferroelectric or piezoelectric material in capacitors and the like.

これらの材料の多くは、その粉末を焼き固めた焼結体と
して使用されている。その場合、得られる材・料の品質
は、焼結の度合で著しく左右されるので、良好な材料を
得るためにはその原料粉末の優れた特性を持っているこ
とが必要である。
Many of these materials are used as sintered bodies obtained by baking and solidifying their powders. In that case, the quality of the material obtained is significantly influenced by the degree of sintering, so in order to obtain a good material, it is necessary that the raw material powder has excellent properties.

一方、近年になり、高分子材料にPZTなどの圧電粉末
を分散させた、所謂複合材料の開発も盛んであるが、こ
れらの性能を高めるためには均一で結晶性のよい易分散
型の微粉末であることが要望されている。
On the other hand, in recent years, there has been active development of so-called composite materials in which piezoelectric powders such as PZT are dispersed in polymer materials, but in order to improve the performance of these materials, it is necessary to use uniform and easily dispersible fine particles with good crystallinity. It is requested that it be a powder.

従来技術 従来のPZT粉末の製造法としては次の方法が知られて
いる。
Prior Art The following method is known as a conventional method for producing PZT powder.

(1)  各構成金属元素の酸化物粉末を混合し、との
混合物を高温で加熱して固相反応を起させる方法。
(1) A method in which oxide powders of each constituent metal element are mixed and the mixture is heated at high temperature to cause a solid phase reaction.

(2)  各構成金属元素のイオンを含む水溶液にしゆ
う酸を滴下して各金属元素をしゆう酸塩として共沈させ
、この共沈しゆう酸塩を熱分解する方法0 (3)  各構成金属元素のアルコキシドの混合物を加
水分解して共沈させ、この共沈加水分解物を熱分解する
方法。
(2) A method of dropping sulfuric acid into an aqueous solution containing ions of each constituent metal element to coprecipitate each metal element as an oxalate salt, and then thermally decomposing the coprecipitated oxalate salt0 (3) Each composition A method in which a mixture of alkoxides of metal elements is hydrolyzed, coprecipitated, and the coprecipitated hydrolyzate is thermally decomposed.

しかしながら、これらの方法はいずれも、何戸の問題が
あって必ずしも満足すべきものとけ言い難い。例えば (1)の固相反応は高温かつ長時間が必要であるという
製造工程上の問題があるばかりでなく、製品粉末も焼結
し難いため、焼結に際して、iI濡の採用あるいけ焼結
促進剤の使用が必要となる問題がある0 (2)の共沈法は、各構成金属元素のしゆう酸塩の共沈
媒体である水に対する溶解度が異なるので、各構成金属
元素を希望成分比で共沈させることが困難であり、その
ため希望組成の単一組成のものが得難い。
However, all of these methods have a number of problems, and it is difficult to say that they are necessarily satisfactory. For example, the solid phase reaction in (1) not only has problems with the manufacturing process in that it requires high temperatures and long periods of time, but also makes it difficult to sinter the product powder. There is a problem in that it requires the use of a promoter.0 In the coprecipitation method (2), the solubility of the oxalate of each constituent metal element in water, which is the coprecipitation medium, differs, so each constituent metal element is mixed into the desired component. It is difficult to co-precipitate at a specific ratio, and therefore it is difficult to obtain a single composition of the desired composition.

(3)の共沈法は、高純度で均一性の高いものが得られ
ると言う利点はあるが、各構成金属元素をアルコキシド
とする必要があるので、その製造が容易でなく、かつ高
価となる。
Co-precipitation method (3) has the advantage of being able to obtain products with high purity and high uniformity, but it is difficult to manufacture and expensive because each constituent metal element needs to be an alkoxide. Become.

本発明者の一人は、前記従来法の欠点を解消するため、
さきに、前記(2)のしゆう酸塩法に改良を加え、しゆ
う酸はエタノールに可溶であり、Zrイオン、Tiイオ
ンのしゆう酸塩及びpbイオ/のしゆう酸塩はいずれも
エタノールに全く不溶である性質を利用して、Pb、 
Zr及びTiの塩、好ましくは硝酸鉛、チタン、ジルコ
ニウムのオキシ硝酸塩の水溶液をエタノールの存在下で
しゆう酸と接触させてPZTの前駆体の沈殿物を得、こ
れを熱分解してPZT微粉末を製造する方法を発明した
One of the inventors of the present invention, in order to eliminate the drawbacks of the conventional method,
First, we improved the oxalate method in (2) above, and found that oxalic acid is soluble in ethanol, and that the oxalate of Zr ions, Ti ions, and pb io/ Taking advantage of the property that Pb is completely insoluble in ethanol,
An aqueous solution of Zr and Ti salts, preferably lead nitrate, titanium, zirconium oxynitrates, is contacted with oxalic acid in the presence of ethanol to obtain a precipitate of PZT precursor, which is pyrolyzed to produce PZT fine particles. Invented a method for producing powder.

(特開昭59−3972号公報及び特開昭59−131
505号公報参照) この方法によると、均一粒度で易焼結性の微粉末が得ら
れるが、得られたPZT微粉末において若干のPb 、
 Zr 、 Ti不足のものとなり、熱分解に際し、微
粒子の相互融着現象を誘起し、かつ熱分解温度も700
℃〜800℃以上を要する問題点があった0 発明の目的 本発明は前記問題点を解決しようとするものであり、そ
の目的は所望のPZT組成でかつ結晶性のよい均一微粒
子のものが容易に得られ、かつ熱分解段階において得ら
れた微粒子が相互融着現象を起すことなく、熱分解温度
も低くてすむPZT微粉末の製造法を提供するにある。
(Japanese Unexamined Patent Publication No. 59-3972 and Unexamined Japanese Patent Application No. 59-131
(Refer to Publication No. 505) According to this method, a fine powder with uniform particle size and easy sinterability can be obtained, but the obtained fine PZT powder contains some Pb,
It is deficient in Zr and Ti, which induces mutual fusion of fine particles during thermal decomposition, and the thermal decomposition temperature is 700°C.
℃ to 800℃ or higher.Objective of the InventionThe present invention aims to solve the above-mentioned problems, and its purpose is to easily produce uniform fine particles with a desired PZT composition and good crystallinity. It is an object of the present invention to provide a method for producing PZT fine powder which can be obtained at a low thermal decomposition temperature without causing mutual fusion of the fine particles obtained in the thermal decomposition step.

発明の構成 本発明者らは前記目的を達成すべく鋭意研究の結果、前
記のエタノール存在下で、PZTの構成金属元素イオン
を含む水溶液にしゆう酸と接触させてしゆう酸塩の沈殿
を生成させる際、しゆう酸を過剰量使用して沈殿を生成
させた後、これにアンモニアガスまたはアンモニア水を
添加してpHを8以上に添加すると、溶液中に残存する
少量のPb。
Structure of the Invention As a result of intensive research to achieve the above object, the present inventors have found that an aqueous solution containing ions of constituent metal elements of PZT is brought into contact with oxalic acid in the presence of ethanol to form a precipitate of oxalate. When precipitating using an excessive amount of oxalic acid, ammonia gas or ammonia water is added to the precipitate to raise the pH to 8 or higher, and a small amount of Pb remains in the solution.

Zr 、 Tiのイオンも完全く沈殿させると同時に過
剰のしゆう酸がアンモニアと反応してエタノール不溶の
しゆう酸アンモニウムが沈殿する。このしゆう酸アンモ
ニウムが沈殿しゆう駿金属塩粒子間に介在し、熱分解の
際、微粒子の相互融着な阻止することによって、結晶性
のよい易分散型微粒子となり、しかも熱分解温度も低く
なることを究明し得た。この知見に基いて本発明を完成
した。
At the same time as Zr and Ti ions are completely precipitated, excess oxalic acid reacts with ammonia to precipitate ethanol-insoluble ammonium oxalate. This ammonium oxalate is interposed between the precipitated metal salt particles and prevents the fine particles from adhering to each other during thermal decomposition, resulting in easily dispersible fine particles with good crystallinity and a low thermal decomposition temperature. I was able to find out what happened. The present invention was completed based on this knowledge.

本発明の要旨は 1)一般式Pbzr1−xTixO3(ただし、XはO
≦X≦1.0を現わす)で示されるペロブスカイト型酸
化物の構成金属元素イオンを含む水溶液を、エタノール
の存在下でしゆう酸と接触させて該酸化物の前駆体の沈
殿を生成させ、この前駆体沈殿物を熱分解してペロブス
カイト型酸化物微粉末の製造法において、しゆう酸を構
成金属元素イオンの全モル数の10〜25モル%過剰に
使用し、構成金属元素イオンを含む水溶液としゆう酸と
をエタノールの存在下で反応させて沈殿を生成させた後
、該沈殿物を含むエタノール水溶液に、しゆう酸と反応
して生成するしゆう酸塩がエタノール水溶液に不溶な塩
を形成し、かつ加熱により分解蒸発する塩基性気体また
は塩基性水溶液と接触させて、pf(を8以上とすると
同時洗しゆう酸アンモニウムを形成させ、これを熱分解
することを特徴とするペロブスカイト型酸化物微粉末の
製造法にある。
The gist of the present invention is 1) general formula Pbzr1-xTixO3 (where X is O
≦X≦1.0) An aqueous solution containing constituent metal element ions of a perovskite-type oxide represented by ≦X≦1.0 is brought into contact with oxalic acid in the presence of ethanol to generate a precipitate of a precursor of the oxide. In the method for producing perovskite-type oxide fine powder by thermally decomposing this precursor precipitate, oxalic acid is used in excess of 10 to 25 mol% of the total number of moles of the constituent metal element ions, and the constituent metal element ions are After reacting an aqueous solution containing oxalic acid with oxalic acid in the presence of ethanol to generate a precipitate, the oxalate salt produced by reacting with oxalic acid is added to the ethanol aqueous solution containing the precipitate, which is insoluble in the ethanol aqueous solution. Contact with a basic gas or basic aqueous solution that forms a salt and decomposes and evaporates by heating, and when the pf (pf) is 8 or more, ammonium oxalate is simultaneously formed, and this is thermally decomposed. A method for producing perovskite-type oxide fine powder.

本発明の方法において使用するチタン原料としては、沈
殿物中に塩素イオンが含まれると、その熱分解物を焼結
する場合悪影響を及はし、特にpbを含む場合、混合水
溶液において不溶性の塩化鉛が生成し、不純のものとな
るので、塩素イオンを含むことの少ない水酸化チタンを
硝酸に溶解させて得られるオキシ硝酸チタンを使用する
ことが好ましい。安価な四塩化チタンを出発原料として
使用する場合は、例えば四塩化チタンに倍容量の蒸留水
を混合して四塩化チタン水溶液となし、これにアンモニ
アを滴下して水酸化チタンの沈殿物とし、水洗して塩素
イオンを除去して得た水酸化チタンを硝酸に溶解するこ
とによってオキシ硝酸チタンとすると、塩素イオンを含
むことの少ないものが得られる。
If the titanium raw material used in the method of the present invention contains chlorine ions in the precipitate, it will have an adverse effect when the thermal decomposition product is sintered, and especially if it contains PB, it will be difficult to chloride, which is insoluble in the mixed aqueous solution. Since lead is produced and the material becomes impure, it is preferable to use titanium oxynitrate obtained by dissolving titanium hydroxide, which contains little chlorine ions, in nitric acid. When using inexpensive titanium tetrachloride as a starting material, for example, titanium tetrachloride is mixed with twice the volume of distilled water to make a titanium tetrachloride aqueous solution, and ammonia is added dropwise to this to form a titanium hydroxide precipitate. When titanium oxynitrate is obtained by dissolving titanium hydroxide obtained by washing with water to remove chlorine ions in nitric acid, titanium oxynitrate containing less chlorine ions can be obtained.

ジルコニウム、飴原料としては、オキシ硝酸ジルコニウ
ム、硝酸鉛として使用することが好ましい。これらは市
販品を水に溶かしたものを使用すればよい。
As the raw material for zirconium and candy, it is preferable to use zirconium oxynitrate and lead nitrate. These may be commercially available products dissolved in water.

しゆう酸を多量のエタノールに溶解してしゆう酸エタノ
ールを作る。しゆう酸量は陽イオンの全モル数の10〜
25モル%過剰とする。これは後で塩基性気体または塩
基性水溶液と接触させてしゆう酸塩を形成させるためこ
のように過剰であることが必要である。1.0モル%よ
り少ないときは、生成しゆう酸塩の量が少なくなり、こ
れによる効果が小さくなり1.25モル%を超えると生
成しゅう酸塩が過剰となり過ぎ、しゆう酸塩の存在効果
が逆に低下する。30モル%過剰の場合はその効果が半
減する。
Oxalic acid ethanol is made by dissolving oxalic acid in a large amount of ethanol. The amount of oxalic acid is from 10 to the total number of moles of cations.
The excess amount is 25 mol%. This excess is necessary for subsequent contact with basic gases or basic aqueous solutions to form the oxalate salt. If it is less than 1.0 mol%, the amount of oxalate produced will be small and the effect will be small.If it exceeds 1.25 mol%, the oxalate produced will be too excessive and the presence of oxalate will be reduced. On the contrary, the effectiveness decreases. If the amount is 30 mol% in excess, the effect will be halved.

しゆう酸とエタノールとの割合は、しゆう酸1モルに対
しエタノールが200モル程度までであることが望まし
い。
The ratio of oxalic acid to ethanol is preferably about 200 mols of ethanol per 1 mol of oxalic acid.

次く、しゆう酸エタノールK PZT構成金属元素イオ
ンを含む水溶液と接触させて該金属酸化物の前駆体の沈
殿を生成させる。この場合の接触法としては、(1)シ
ゆう酸エタノール中に構成金属元素イオン水溶液を滴下
する方法、(2)構成金属元素イオン水溶液中にしゆう
酸エタノールを滴下する方法があるが、(1)の方法が
好ましい。この時の反応させる温度はO〜室湛でよい。
Next, the oxalic acid ethanol K is brought into contact with an aqueous solution containing ions of metal elements constituting PZT to form a precipitate of the metal oxide precursor. In this case, contact methods include (1) a method of dropping an aqueous solution of constituent metal element ions into an aqueous solution of constituent metal element ions, and (2) a method of dropping an aqueous solution of constituent metal element ions into an aqueous solution of constituent metal element ions. ) method is preferred. The reaction temperature at this time may be from 0 to room temperature.

低温である方が微粒子となる点で好ましい。A lower temperature is preferable in that fine particles are formed.

得られた沈殿物を含むエタノール水溶液に、しゆう酸と
反応して生成するしゆう酸塩がエタノール水溶液に不溶
で、かつ加熱により分解蒸発する塩基性気体または塩基
性水溶液と接触させる。該塩基性物質としては、例えば
アンモニア、テトラメチルアンモニウムが挙げられる。
The ethanol aqueous solution containing the obtained precipitate is brought into contact with a basic gas or a basic aqueous solution in which the oxalate salt produced by reaction with oxalic acid is insoluble in the ethanol aqueous solution and decomposes and evaporates upon heating. Examples of the basic substance include ammonia and tetramethylammonium.

中でも安価で容易に入数できるアンモニアが好ましい。Among them, ammonia is preferred because it is inexpensive and easily available.

(以下アンモニアを代表として説明する。) アンモニアの使用量はpH8以上になり、過剰しゆう酸
をしゆう酸アンモニウム塩とする量である◇pHが8よ
り低いと、溶液中に残存する少量のPb 、 Zr 、
 Tiのイオンを完全に沈殿させることが困難である。
(Ammonia will be explained below as a representative.) The amount of ammonia used is the amount that will raise the pH to 8 or higher and convert excess oxalic acid into oxalic acid ammonium salt. ◇If the pH is lower than 8, a small amount of Pb, Zr,
It is difficult to completely precipitate Ti ions.

これにより生成したしゅう酸アンモニウムはエタノール
水溶液に不溶であるので、全構成金属元素イオンのしゆ
う酸塩粒子の間に介在し、これを熱分解する際、PZT
粒子同志の融着を阻止し、結晶性のよい易分散型微粒子
を生成する。
The ammonium oxalate thus produced is insoluble in the ethanol aqueous solution, so it is interposed between the oxalate particles of all the constituent metal element ions, and when it is thermally decomposed, PZT
Prevents fusion of particles and produces easily dispersible fine particles with good crystallinity.

そのため、これKよって得られたPZT微粒子は焼結性
が優れたものとなシ、アンモニア処理を施こさないもの
に比べ100℃以上低い温度で熱分解及び結晶化が終了
し得られる。
Therefore, the PZT fine particles obtained by this K have excellent sinterability, and thermal decomposition and crystallization are completed at a temperature lower than that of particles not subjected to ammonia treatment by 100° C. or more.

得られた沈殿物は沢過して、エタノール中に再分散させ
て沈殿物中に含まれる硝酸イオン、塩素イオンを除くこ
とが望ましい。沈殿物は乾燥後、務 砕解してPZT酸化物前駆粉末とする。これを例えば6
00〜800℃で仮焼して熱分解させる。この場合、T
i/Zrの割合によって固溶体の形成温度が異なるので
、X線粉末回折等でその割合を調べて熱分解温度を決め
ることが望ましい。
It is desirable to filter the obtained precipitate and redisperse it in ethanol to remove nitrate ions and chloride ions contained in the precipitate. After drying, the precipitate is crushed to obtain a PZT oxide precursor powder. For example, 6
Calcinate at 00 to 800°C for thermal decomposition. In this case, T
Since the formation temperature of the solid solution varies depending on the i/Zr ratio, it is desirable to determine the thermal decomposition temperature by examining the ratio using X-ray powder diffraction or the like.

PbTiO3の場合、600℃で完全に熱分解及び結晶
化できる。得られる微粉末の粒子径は0.1μmと非常
に細く、粒子形状はほぼ球状に近い結晶性の優れたもの
となる。これに対し、アンモニア処理を施さない場合は
700〜800℃(塩素イオンを完全に除くと700℃
)で熱分解することが必要である。このように本発明の
方法では熱分解温度も低くてすみ経済的である。
In the case of PbTiO3, it can be completely thermally decomposed and crystallized at 600°C. The resulting fine powder has a very fine particle size of 0.1 μm, and the particle shape is almost spherical and has excellent crystallinity. On the other hand, if no ammonia treatment is applied, the temperature will be 700 to 800℃ (700℃ if chlorine ions are completely removed).
) is required. As described above, the method of the present invention is economical since the thermal decomposition temperature is low.

実施例1゜ 市販のTiG14溶液に倍容量の蒸留水を加えて四塩化
チタン水溶液とし、これにアンモニア水を加えて水酸化
チタンとし、これを水洗、沢過後濃硝酸を添加してオキ
シ硝酸チタンとしだ。このオキシ硝酸チタン溶液中のT
i?l1度は0.025697dであった。
Example 1: Double the volume of distilled water was added to a commercially available TiG14 solution to make a titanium tetrachloride aqueous solution, and aqueous ammonia was added to this to make titanium hydroxide. After washing and filtration, concentrated nitric acid was added to make titanium oxynitrate. Toshida. T in this titanium oxynitrate solution
i? The l1 degree was 0.025697d.

とのオキシ硝酸チタン溶液30.0 TILtとTiに
対して等モル量の硝酸鉛を蒸留水40.0 dに溶解し
た水溶液を混合した。この混合水溶液を、Tiに対して
2.2モルに相当する量のしゆう酸をエタノール280
 ml K溶解したしゅう酸エタノール溶液中に室温で
3.9 m / mi、Hの速度で滴下した。これに更
にアンモニア水601を1.811Lt/minの速度
で滴下して白色沈殿を得た。この時のpHは9.0であ
った。得られた共沈物を2回エタノールで洗浄後、乾燥
し、粉砕したものを600℃で2時間熱処理した。得ら
れた粉末はX線回折によって調べたところ単−相のPb
TiO3で、未反応物質の共存は全く認められなかった
A titanium oxynitrate solution of 30.0 d of titanium oxynitrate was mixed with an aqueous solution prepared by dissolving lead nitrate in an equimolar amount with respect to TILt and Ti in 40.0 d of distilled water. This mixed aqueous solution was mixed with 280 ethanol of ethanol in an amount equivalent to 2.2 mol of Ti.
ml K dissolved in oxalic acid in ethanol solution at room temperature at a rate of 3.9 m/mi, H. Further, ammonia water 601 was added dropwise to this at a rate of 1.811 Lt/min to obtain a white precipitate. The pH at this time was 9.0. The resulting coprecipitate was washed twice with ethanol, dried, and ground, followed by heat treatment at 600° C. for 2 hours. The obtained powder was examined by X-ray diffraction and was found to be single-phase Pb.
No coexistence of unreacted substances was observed in TiO3.

また、このPbTi0.粉末は、水中での超音波分散に
より粒子が容易に分散し、走査型電子顕微鏡で観察した
ところ、0.10μmであった。
Moreover, this PbTi0. Particles of the powder were easily dispersed by ultrasonic dispersion in water, and when observed with a scanning electron microscope, the particle size was 0.10 μm.

実施例2゜ 実施例1で得たオキシ硝酸チタン溶液3o、omzとT
iに対して等モル量のオキシ硝酸ジルコニウム及びTi
に対して2倍モル量の硝酸鉛を蒸留水70.0117に
溶解した水溶液を混合した。これをTiに対して4.4
モル量のしゆう酸をエタノール400社に溶解したしゅ
う酸エタノール溶液中に室温で1.2d/minの速度
で滴下した後、さらにアンモニア水801を2.8 d
 / minの速度で滴下して白色沈殿を得た。この時
のpHは10.0であった。得られた沈殿物を2回エタ
ノールで洗浄後、乾燥。
Example 2゜ Titanium oxynitrate solution 3o, omz and T obtained in Example 1
Equimolar amounts of zirconium oxynitrate and Ti for i
An aqueous solution in which twice the molar amount of lead nitrate was dissolved in distilled water 70.0117 was mixed. This is 4.4 for Ti.
After dropping a molar amount of oxalic acid into an oxalic acid ethanol solution dissolved in ethanol 400 at a rate of 1.2 d/min at room temperature, 2.8 d of ammonia water 801 was added.
A white precipitate was obtained by dropping at a rate of /min. The pH at this time was 10.0. The obtained precipitate was washed twice with ethanol and then dried.

粉砕したものを、空気中で800℃で2時間熱処理した
。得られた粉末をX線回折によって調べたところ、PZ
T相であシ、未反応物質の存在は全く認められなかった
。このPZT粉末は水中で超音波分散により容易に粒子
が分散し、走査型電子顕微鏡で観察したところ、粒径は
0.10μmであった。
The pulverized material was heat treated at 800° C. for 2 hours in air. When the obtained powder was examined by X-ray diffraction, PZ
In the T phase, no unreacted substances were observed. The particles of this PZT powder were easily dispersed by ultrasonic dispersion in water, and when observed with a scanning electron microscope, the particle size was 0.10 μm.

比較例1゜ 実施例2と同様な方法で調製した鉛、ジルコニウム、チ
タンの混合水溶液中に、実施例2と同様な方法で調製し
たしゅう酸エタノールを室温で20.0 dl min
の速度で滴下して白色沈殿を得た0得られた沈殿物を2
回エタノールで洗浄後、乾燥。
Comparative Example 1゜Into a mixed aqueous solution of lead, zirconium, and titanium prepared in the same manner as in Example 2, 20.0 dl min of oxalic acid ethanol prepared in the same manner as in Example 2 was added at room temperature.
A white precipitate was obtained by dropping the precipitate at a rate of 0.
After washing with ethanol twice, dry.

粉砕したものを、空気中で800℃で2時間熱処理した
。得られた粉末をX線回折によって調べたところ、PZ
T以外に未反応のPbO、PbZrO3ノ存在が認めら
れた。この粉末を走査型電子顕微鏡で観察したところ、
粒子の融着が認められ、七〇粒径は0.80μmであっ
た0また超音波分散によってもこの融着は全く解消され
ないことが観察された0発明の効果 本発明の方法によると、次のような優れた効果を有する
The pulverized material was heat treated at 800° C. for 2 hours in air. When the obtained powder was examined by X-ray diffraction, PZ
In addition to T, the presence of unreacted PbO and PbZrO3 was observed. When this powder was observed with a scanning electron microscope, it was found that
Particle fusion was observed, and the particle size was 0.80 μm.It was also observed that even ultrasonic dispersion did not eliminate this fusion at all.Effects of the Invention According to the method of the present invention, It has excellent effects such as:

1)構成金属元素イオンをエタノールの存在下でしゆう
酸塩として共沈させた後、これにアンモニア等の塩基性
気体または塩基性水溶液を接触させてpHを、8以上と
するため、構成金属イオンを完全に沈殿し得られ、所望
組成のPZTの均一で、かつ結晶性のよい微粉末が容易
に得られる0 2)マた、その際過剰のしゆう酸とアンモニア等の塩基
性物としゆう酸塩基性塩が構成金属元素イオンの共沈物
粒子中に介在するため、熱分解に際し、微粒子の相互融
着現象を起こすことがなく、その上熱分解温度を低下さ
せ得られる。
1) After co-precipitating the constituent metal element ions as oxalates in the presence of ethanol, the constituent metal elements are brought into contact with a basic gas such as ammonia or a basic aqueous solution to adjust the pH to 8 or higher. It is possible to completely precipitate ions and easily obtain a uniform fine powder of PZT with the desired composition and good crystallinity. Since the oxalic acid basic salt is present in the coprecipitate particles of the constituent metal element ions, the phenomenon of mutual fusion of fine particles does not occur during thermal decomposition, and furthermore, the thermal decomposition temperature can be lowered.

3)%られたPZT酸化物は前記のような特性を持つも
のであるから、その圧電性を利用して、例えば超音波診
断装置、探傷計、圧カセンサ、ブザー、マイクロホン、
スピーカー、ステレオ用ピックアップ、圧電アクチュエ
ーターなどに有利に使用し得られる。
3) Since the PZT oxide obtained has the above-mentioned properties, its piezoelectricity can be used for applications such as ultrasonic diagnostic equipment, flaw detectors, pressure sensors, buzzers, microphones,
It can be advantageously used in speakers, stereo pickups, piezoelectric actuators, etc.

また、ゴムや合成樹脂ポリマーと複合化させて血圧計や
広表面スピーカー等に用いる場合、薄膜化等も容易であ
る。
Furthermore, when composited with rubber or synthetic resin polymer and used in blood pressure monitors, wide-surface speakers, etc., it is easy to form a thin film.

特許出願人 科学技術庁無機材質研究所長後  藤  
   優
Patent applicant Goto, director of the Institute for Inorganic Materials, Science and Technology Agency
Excellent

Claims (1)

【特許請求の範囲】 1)一般式PbZr_1_−_xTi_xO_3(ただ
しxは0≦x≦1.0を現わす)で示されるペロブスカ
イト型酸化物の構成金属元素イオンを含む水溶液を、エ
タノールの存在下でしゆう酸と接触させて該酸化物の前
駆体の沈殿を生成させ、この前駆体沈殿物を熱分解して
ペロブスカイト型酸化物微粉末の製造法において、しゆ
う酸を構成金属元素イオンの全モル数の10〜25モル
%過剰に使用し、構成金属元素イオンを含む水溶液とし
ゆう酸とをエタノールの存在下で反応させて沈殿を生成
させた後、該沈殿物を含むエタノール水溶液に、しゆう
酸と反応して生成するしゆう酸塩がエタノール水溶液に
不溶で、かつ加熱により分解蒸発する塩基性気体または
塩基性水溶液を接触させて、pHを8以上とすると同時
にしゆう酸アンモニウムを形成させ、これを熱分解する
ことを特徴とするペロブスカイト型酸化物微粉末の製造
法。 2)前記塩基性気体または塩基性水溶液がアンモニアガ
スまたはアンモニア水溶液である特許請求の範囲第1項
記載ペロブスカイト型酸化物微粉末の製造法。
[Claims] 1) An aqueous solution containing constituent metal element ions of a perovskite oxide represented by the general formula PbZr_1_-_xTi_xO_3 (where x represents 0≦x≦1.0) in the presence of ethanol. In the method for producing perovskite-type oxide fine powder by contacting with oxalic acid to form a precipitate of a precursor of the oxide and thermally decomposing the precursor precipitate, oxalic acid is used to remove all of the constituent metal element ions. The aqueous solution containing the constituent metal element ions is reacted with oxalic acid in the presence of ethanol to form a precipitate, and then the ethanol aqueous solution containing the precipitate is added to the ethanol aqueous solution containing the precipitate. The oxalate produced by reacting with citric acid is brought into contact with a basic gas or a basic aqueous solution that is insoluble in the ethanol aqueous solution and decomposes and evaporates upon heating to raise the pH to 8 or higher and at the same time form ammonium oxalate. 1. A method for producing perovskite-type oxide fine powder, which comprises: 2) The method for producing perovskite-type oxide fine powder according to claim 1, wherein the basic gas or basic aqueous solution is an ammonia gas or an ammonia aqueous solution.
JP60096541A 1985-05-07 1985-05-07 Production of pulverous perovskite type oxide powder Granted JPS61256923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60096541A JPS61256923A (en) 1985-05-07 1985-05-07 Production of pulverous perovskite type oxide powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60096541A JPS61256923A (en) 1985-05-07 1985-05-07 Production of pulverous perovskite type oxide powder

Publications (2)

Publication Number Publication Date
JPS61256923A true JPS61256923A (en) 1986-11-14
JPH0249251B2 JPH0249251B2 (en) 1990-10-29

Family

ID=14167964

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPS61256923A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355118A (en) * 1986-08-22 1988-03-09 Natl Inst For Res In Inorg Mater Production of transparent plzt sintered product
EP0287064A2 (en) * 1987-04-16 1988-10-19 Nippon Steel Corporation Process for producing superconductive ceramics
WO2003010092A1 (en) * 2001-07-27 2003-02-06 Tdk Corporation Method for producing spherical oxide powder and apparatus for producing spherical powder, composite dielectric material, and substrate and process for producing substrate

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH042154U (en) * 1990-04-18 1992-01-09
JPH08331235A (en) * 1995-05-22 1996-12-13 United Microelectron Corp Dinamically programmable output message device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251517A (en) * 1985-04-11 1986-11-08 Mitsubishi Petrochem Co Ltd Production of perovskite type oxide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251517A (en) * 1985-04-11 1986-11-08 Mitsubishi Petrochem Co Ltd Production of perovskite type oxide

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355118A (en) * 1986-08-22 1988-03-09 Natl Inst For Res In Inorg Mater Production of transparent plzt sintered product
EP0287064A2 (en) * 1987-04-16 1988-10-19 Nippon Steel Corporation Process for producing superconductive ceramics
WO2003010092A1 (en) * 2001-07-27 2003-02-06 Tdk Corporation Method for producing spherical oxide powder and apparatus for producing spherical powder, composite dielectric material, and substrate and process for producing substrate
KR100687178B1 (en) * 2001-07-27 2007-02-27 티디케이가부시기가이샤 Production method of spherical oxide powder and production apparatus of spherical powder

Also Published As

Publication number Publication date
JPH0249251B2 (en) 1990-10-29

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