JPS61256622A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS61256622A
JPS61256622A JP9740485A JP9740485A JPS61256622A JP S61256622 A JPS61256622 A JP S61256622A JP 9740485 A JP9740485 A JP 9740485A JP 9740485 A JP9740485 A JP 9740485A JP S61256622 A JPS61256622 A JP S61256622A
Authority
JP
Japan
Prior art keywords
duct
crucible
material vapor
electron
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9740485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467774B2 (ru
Inventor
Teruo Ina
伊奈　照夫
Masahiro Hanai
正博 花井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9740485A priority Critical patent/JPS61256622A/ja
Publication of JPS61256622A publication Critical patent/JPS61256622A/ja
Publication of JPH0467774B2 publication Critical patent/JPH0467774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP9740485A 1985-05-08 1985-05-08 薄膜形成装置 Granted JPS61256622A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9740485A JPS61256622A (ja) 1985-05-08 1985-05-08 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9740485A JPS61256622A (ja) 1985-05-08 1985-05-08 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS61256622A true JPS61256622A (ja) 1986-11-14
JPH0467774B2 JPH0467774B2 (ru) 1992-10-29

Family

ID=14191567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9740485A Granted JPS61256622A (ja) 1985-05-08 1985-05-08 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS61256622A (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099791A (en) * 1989-09-08 1992-03-31 Mitsubishi Denki Kabushiki Kaisha Cluster beam thin film deposition apparatus with thermionic electron control

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913793U (ru) * 1972-05-11 1974-02-05
JPS552901A (en) * 1978-06-19 1980-01-10 American District Telegraph Co Optical smoke detector
JPS5754930A (en) * 1980-09-20 1982-04-01 Minolta Camera Co Ltd Exposure controlling circuit of camera
JPS58118119A (ja) * 1982-01-07 1983-07-14 Nec Corp 反応性イオンプレ−テイング装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913793U (ru) * 1972-05-11 1974-02-05
JPS552901A (en) * 1978-06-19 1980-01-10 American District Telegraph Co Optical smoke detector
JPS5754930A (en) * 1980-09-20 1982-04-01 Minolta Camera Co Ltd Exposure controlling circuit of camera
JPS58118119A (ja) * 1982-01-07 1983-07-14 Nec Corp 反応性イオンプレ−テイング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5099791A (en) * 1989-09-08 1992-03-31 Mitsubishi Denki Kabushiki Kaisha Cluster beam thin film deposition apparatus with thermionic electron control

Also Published As

Publication number Publication date
JPH0467774B2 (ru) 1992-10-29

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