JPS61250952A - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS61250952A
JPS61250952A JP60091828A JP9182885A JPS61250952A JP S61250952 A JPS61250952 A JP S61250952A JP 60091828 A JP60091828 A JP 60091828A JP 9182885 A JP9182885 A JP 9182885A JP S61250952 A JPS61250952 A JP S61250952A
Authority
JP
Japan
Prior art keywords
electron beam
image
sample
energy
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60091828A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03737B2 (enExample
Inventor
Tadanori Yoshioka
吉岡　忠則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60091828A priority Critical patent/JPS61250952A/ja
Publication of JPS61250952A publication Critical patent/JPS61250952A/ja
Publication of JPH03737B2 publication Critical patent/JPH03737B2/ja
Granted legal-status Critical Current

Links

JP60091828A 1985-04-27 1985-04-27 電子顕微鏡 Granted JPS61250952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60091828A JPS61250952A (ja) 1985-04-27 1985-04-27 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60091828A JPS61250952A (ja) 1985-04-27 1985-04-27 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS61250952A true JPS61250952A (ja) 1986-11-08
JPH03737B2 JPH03737B2 (enExample) 1991-01-08

Family

ID=14037466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60091828A Granted JPS61250952A (ja) 1985-04-27 1985-04-27 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS61250952A (enExample)

Also Published As

Publication number Publication date
JPH03737B2 (enExample) 1991-01-08

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