JPS61248837A - カセット内試料検出装置 - Google Patents

カセット内試料検出装置

Info

Publication number
JPS61248837A
JPS61248837A JP8632585A JP8632585A JPS61248837A JP S61248837 A JPS61248837 A JP S61248837A JP 8632585 A JP8632585 A JP 8632585A JP 8632585 A JP8632585 A JP 8632585A JP S61248837 A JPS61248837 A JP S61248837A
Authority
JP
Japan
Prior art keywords
cassette
wafer
detector
sample
samples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8632585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0433696B2 (enrdf_load_stackoverflow
Inventor
Tomoyoshi Nishihara
西原　伴良
Keiji Tada
多田　啓司
Isamu Kage
勇 鹿毛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8632585A priority Critical patent/JPS61248837A/ja
Publication of JPS61248837A publication Critical patent/JPS61248837A/ja
Publication of JPH0433696B2 publication Critical patent/JPH0433696B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP8632585A 1985-04-24 1985-04-24 カセット内試料検出装置 Granted JPS61248837A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8632585A JPS61248837A (ja) 1985-04-24 1985-04-24 カセット内試料検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8632585A JPS61248837A (ja) 1985-04-24 1985-04-24 カセット内試料検出装置

Publications (2)

Publication Number Publication Date
JPS61248837A true JPS61248837A (ja) 1986-11-06
JPH0433696B2 JPH0433696B2 (enrdf_load_stackoverflow) 1992-06-03

Family

ID=13883684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8632585A Granted JPS61248837A (ja) 1985-04-24 1985-04-24 カセット内試料検出装置

Country Status (1)

Country Link
JP (1) JPS61248837A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6885454B2 (ja) * 2019-12-26 2021-06-16 井関農機株式会社 作業車両

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019168A (enrdf_load_stackoverflow) * 1973-06-18 1975-02-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019168A (enrdf_load_stackoverflow) * 1973-06-18 1975-02-28

Also Published As

Publication number Publication date
JPH0433696B2 (enrdf_load_stackoverflow) 1992-06-03

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