JPS61246359A - 薄膜形成装置 - Google Patents
薄膜形成装置Info
- Publication number
- JPS61246359A JPS61246359A JP8657785A JP8657785A JPS61246359A JP S61246359 A JPS61246359 A JP S61246359A JP 8657785 A JP8657785 A JP 8657785A JP 8657785 A JP8657785 A JP 8657785A JP S61246359 A JPS61246359 A JP S61246359A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- thin film
- filament
- film forming
- filaments
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 238000005452 bending Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 239000011364 vaporized material Substances 0.000 claims 1
- 238000001704 evaporation Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657785A JPS61246359A (ja) | 1985-04-24 | 1985-04-24 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8657785A JPS61246359A (ja) | 1985-04-24 | 1985-04-24 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61246359A true JPS61246359A (ja) | 1986-11-01 |
| JPH0359984B2 JPH0359984B2 (enrdf_load_stackoverflow) | 1991-09-12 |
Family
ID=13890859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8657785A Granted JPS61246359A (ja) | 1985-04-24 | 1985-04-24 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61246359A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100719664B1 (ko) | 2005-08-30 | 2007-05-17 | 삼성에스디아이 주식회사 | 도가니를 채용한 증발원 |
-
1985
- 1985-04-24 JP JP8657785A patent/JPS61246359A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100719664B1 (ko) | 2005-08-30 | 2007-05-17 | 삼성에스디아이 주식회사 | 도가니를 채용한 증발원 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0359984B2 (enrdf_load_stackoverflow) | 1991-09-12 |
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