JPS61240543A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS61240543A
JPS61240543A JP60083353A JP8335385A JPS61240543A JP S61240543 A JPS61240543 A JP S61240543A JP 60083353 A JP60083353 A JP 60083353A JP 8335385 A JP8335385 A JP 8335385A JP S61240543 A JPS61240543 A JP S61240543A
Authority
JP
Japan
Prior art keywords
holder
chip
extraction
voltage
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60083353A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0584019B2 (cs
Inventor
Yoshizo Sakuma
佐久間　美三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60083353A priority Critical patent/JPS61240543A/ja
Publication of JPS61240543A publication Critical patent/JPS61240543A/ja
Publication of JPH0584019B2 publication Critical patent/JPH0584019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP60083353A 1985-04-18 1985-04-18 イオン源 Granted JPS61240543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60083353A JPS61240543A (ja) 1985-04-18 1985-04-18 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60083353A JPS61240543A (ja) 1985-04-18 1985-04-18 イオン源

Publications (2)

Publication Number Publication Date
JPS61240543A true JPS61240543A (ja) 1986-10-25
JPH0584019B2 JPH0584019B2 (cs) 1993-11-30

Family

ID=13800071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60083353A Granted JPS61240543A (ja) 1985-04-18 1985-04-18 イオン源

Country Status (1)

Country Link
JP (1) JPS61240543A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012169297A (ja) * 2012-05-11 2012-09-06 Hitachi High-Technologies Corp ガス電界電離イオン源，荷電粒子顕微鏡、及び装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117053U (ja) * 1982-02-04 1983-08-10 日本電子株式会社 電界電離型イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117053U (ja) * 1982-02-04 1983-08-10 日本電子株式会社 電界電離型イオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012169297A (ja) * 2012-05-11 2012-09-06 Hitachi High-Technologies Corp ガス電界電離イオン源，荷電粒子顕微鏡、及び装置

Also Published As

Publication number Publication date
JPH0584019B2 (cs) 1993-11-30

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