JPS61239146A - 被検査対象物体の検査方法 - Google Patents

被検査対象物体の検査方法

Info

Publication number
JPS61239146A
JPS61239146A JP8006185A JP8006185A JPS61239146A JP S61239146 A JPS61239146 A JP S61239146A JP 8006185 A JP8006185 A JP 8006185A JP 8006185 A JP8006185 A JP 8006185A JP S61239146 A JPS61239146 A JP S61239146A
Authority
JP
Japan
Prior art keywords
window
circular object
circular
memory
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8006185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418769B2 (en:Method
Inventor
Kenji Asano
賢治 浅野
Tatsuo Yamamura
山村　辰男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP8006185A priority Critical patent/JPS61239146A/ja
Publication of JPS61239146A publication Critical patent/JPS61239146A/ja
Publication of JPH0418769B2 publication Critical patent/JPH0418769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP8006185A 1985-04-17 1985-04-17 被検査対象物体の検査方法 Granted JPS61239146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8006185A JPS61239146A (ja) 1985-04-17 1985-04-17 被検査対象物体の検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8006185A JPS61239146A (ja) 1985-04-17 1985-04-17 被検査対象物体の検査方法

Publications (2)

Publication Number Publication Date
JPS61239146A true JPS61239146A (ja) 1986-10-24
JPH0418769B2 JPH0418769B2 (en:Method) 1992-03-27

Family

ID=13707714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8006185A Granted JPS61239146A (ja) 1985-04-17 1985-04-17 被検査対象物体の検査方法

Country Status (1)

Country Link
JP (1) JPS61239146A (en:Method)

Also Published As

Publication number Publication date
JPH0418769B2 (en:Method) 1992-03-27

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