JPS61238961A - 基材表面の改質方法 - Google Patents

基材表面の改質方法

Info

Publication number
JPS61238961A
JPS61238961A JP7898185A JP7898185A JPS61238961A JP S61238961 A JPS61238961 A JP S61238961A JP 7898185 A JP7898185 A JP 7898185A JP 7898185 A JP7898185 A JP 7898185A JP S61238961 A JPS61238961 A JP S61238961A
Authority
JP
Japan
Prior art keywords
carbon
base material
fluorine
compd
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7898185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0362792B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Kasai
英一 河西
Sachiko Okazaki
幸子 岡崎
Teruhisa Kondo
照久 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Original Assignee
Toyo Tanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd filed Critical Toyo Tanso Co Ltd
Priority to JP7898185A priority Critical patent/JPS61238961A/ja
Publication of JPS61238961A publication Critical patent/JPS61238961A/ja
Publication of JPH0362792B2 publication Critical patent/JPH0362792B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP7898185A 1985-04-12 1985-04-12 基材表面の改質方法 Granted JPS61238961A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7898185A JPS61238961A (ja) 1985-04-12 1985-04-12 基材表面の改質方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7898185A JPS61238961A (ja) 1985-04-12 1985-04-12 基材表面の改質方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP10836387A Division JPH062945B2 (ja) 1987-04-30 1987-04-30 基材表面の改質方法

Publications (2)

Publication Number Publication Date
JPS61238961A true JPS61238961A (ja) 1986-10-24
JPH0362792B2 JPH0362792B2 (enrdf_load_stackoverflow) 1991-09-27

Family

ID=13677066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7898185A Granted JPS61238961A (ja) 1985-04-12 1985-04-12 基材表面の改質方法

Country Status (1)

Country Link
JP (1) JPS61238961A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756964A (en) * 1986-09-29 1988-07-12 The Dow Chemical Company Barrier films having an amorphous carbon coating and methods of making
US4917953A (en) * 1987-02-28 1990-04-17 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of forming solid lubricaitng film on ceramic material and product produced by the same
US5733610A (en) * 1988-06-06 1998-03-31 Research Development Corporation Of Japan Atmospheric pressure plasma reaction method of forming a hydrophobic film
CN105015093A (zh) * 2015-06-18 2015-11-04 镇江华印电路板有限公司 稳定性好的碳膜板

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130671A (ja) * 1984-07-23 1986-02-12 Nippon Telegr & Teleph Corp <Ntt> 硬質カ−ボン膜
JPS6171626A (ja) * 1984-09-10 1986-04-12 オボニック・シンセティック・マティリアルズ・カンパニ−・インコ−ポレ−テッド グロー放電による硬質の炭素質膜の堆積方法及び該方法により堆積された膜を有する半導体デバイス

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130671A (ja) * 1984-07-23 1986-02-12 Nippon Telegr & Teleph Corp <Ntt> 硬質カ−ボン膜
JPS6171626A (ja) * 1984-09-10 1986-04-12 オボニック・シンセティック・マティリアルズ・カンパニ−・インコ−ポレ−テッド グロー放電による硬質の炭素質膜の堆積方法及び該方法により堆積された膜を有する半導体デバイス

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756964A (en) * 1986-09-29 1988-07-12 The Dow Chemical Company Barrier films having an amorphous carbon coating and methods of making
US4917953A (en) * 1987-02-28 1990-04-17 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of forming solid lubricaitng film on ceramic material and product produced by the same
US5733610A (en) * 1988-06-06 1998-03-31 Research Development Corporation Of Japan Atmospheric pressure plasma reaction method of forming a hydrophobic film
CN105015093A (zh) * 2015-06-18 2015-11-04 镇江华印电路板有限公司 稳定性好的碳膜板

Also Published As

Publication number Publication date
JPH0362792B2 (enrdf_load_stackoverflow) 1991-09-27

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