JPS61234058A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS61234058A
JPS61234058A JP7425485A JP7425485A JPS61234058A JP S61234058 A JPS61234058 A JP S61234058A JP 7425485 A JP7425485 A JP 7425485A JP 7425485 A JP7425485 A JP 7425485A JP S61234058 A JPS61234058 A JP S61234058A
Authority
JP
Japan
Prior art keywords
heat sink
semiconductor
mount
mounting portion
sink plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7425485A
Other languages
Japanese (ja)
Inventor
Akio Yasukawa
彰夫 保川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7425485A priority Critical patent/JPS61234058A/en
Publication of JPS61234058A publication Critical patent/JPS61234058A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress
    • H01L2924/3511Warping

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent a crack from occurring by thinly forming a part between a heat sink plate mount and a semiconductor mount, thereby absorbing the deformation of mounting the heat sink plate by the thinly formed portion. CONSTITUTION:Since a thin portion 1d is formed between a heat sink plate mount 1q and a semiconductor mount 1b, when a screw is engaged within a hole 6a of the mount 1a and the mount 1a is clamped with the heat sink plate, the mount 1a is deflected and deformed along the heat sink plate. However, the deformation of clamping the heat sink plate at the mount 1a is absorbed by the thin portion 1d. Accordingly, since the mount 1b mounted with a semiconductor element 2 and a resin unit 5 is not deformed, the element 2 and the unit 5 integrated with the mount 1b are hardly deformed.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は半導体装置、特に樹脂封止型半導体装置に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a semiconductor device, and particularly to a resin-sealed semiconductor device.

〔発明の背景〕[Background of the invention]

従来のこの種の半導体装置は1例えば実願昭54−11
9183号公報に記載されている記載のようなものがあ
る。この構成は、第10図−第13図に示すように、ビ
ス穴を設けた放熱板取付部と半導体取付部1bからなる
金属基板1と、その半導体取付部1b上に取付けられた
半導体素子2と、この半導体素子2および半導体取付部
1bを覆うように金属基板1に一体に結合された樹脂体
5と、この樹脂体5に先端部が埋設されると共に、金属
細線3を介して半導体素子2に接続されたリード線4に
より構成されている。
A conventional semiconductor device of this type is 1, for example, Utility Application No.
There is a description such as that described in Publication No. 9183. As shown in FIGS. 10 to 13, this configuration includes a metal substrate 1 consisting of a heat sink mounting part with screw holes and a semiconductor mounting part 1b, and a semiconductor element 2 mounted on the semiconductor mounting part 1b. A resin body 5 is integrally bonded to the metal substrate 1 so as to cover the semiconductor element 2 and the semiconductor mounting portion 1b. 2 and a lead wire 4 connected to the terminal 2.

上記のように金属基板1に第4図に示すように放熱板7
を取付ける際は、放熱板取付部1aのビス穴6にビス8
をねじ込むと、放熱板取付部1aは放熱板7に締付けら
れるので、放熱板取付部1aは放熱板7に沿って反り変
形する。
As shown in FIG.
When installing, insert screw 8 into screw hole 6 of heat sink mounting part 1a.
When screwed in, the heat sink mounting portion 1a is tightened to the heat sink 7, so that the heat sink mounting portion 1a is warped and deformed along the heat sink 7.

この場合、半導体取付部1bはくびれることなく放熱板
取付部1aと一体に形成されているので。
In this case, the semiconductor mounting portion 1b is formed integrally with the heat sink mounting portion 1a without being constricted.

その放熱板取付部1aと一緒に反って変形するから、半
導体素子2および樹脂体5も半導体取付部1bと一緒に
反って変形することになる。このた、め半導体素子2お
よび樹脂体5に大きな引張力を生じてクラックが発生す
る恐れがある。
Since the heat dissipation plate attachment portion 1a is warped and deformed, the semiconductor element 2 and the resin body 5 are also warped and deformed together with the semiconductor attachment portion 1b. Therefore, there is a possibility that a large tensile force is generated in the semiconductor element 2 and the resin body 5, and cracks may occur.

〔発明の目的〕[Purpose of the invention]

本発明は上記欠点を解消するためになされたもので、樹
脂封止形半導体装置における樹脂体及び半導体素子のク
ラック等の発生しにくい構造を提供することを目的とす
るものである。
The present invention was made in order to eliminate the above-mentioned drawbacks, and an object of the present invention is to provide a structure in which the resin body and the semiconductor element in a resin-sealed semiconductor device are less likely to be cracked.

〔発明の概要〕[Summary of the invention]

本発明の半導体装置は金属基板の放熱板取付部または、
放熱板取付部と半導体取付部の間の、少なくとも一部を
薄く形成することにより、放熱板取付部に放熱板を取付
けた場合の変形を、薄く形成された部分で吸収するよう
に構成したことを特徴とするものである。
The semiconductor device of the present invention includes a heat sink mounting portion of a metal substrate or
By forming at least a part of the space between the heat sink mounting part and the semiconductor mounting part thin, deformation when the heat sink is attached to the heat sink mounting part is absorbed by the thinly formed part. It is characterized by:

〔発明の実施例〕[Embodiments of the invention]

以下本発明の一実施例を図面を参照して説明する。第1
図〜第3図に示す符号のうち第10図〜第13図に示す
符号と同一のものは同一部分を示すものとする。
An embodiment of the present invention will be described below with reference to the drawings. 1st
Among the reference numerals shown in FIGS. 10 to 3, the same reference numerals as those shown in FIGS. 10 to 13 indicate the same parts.

第1図〜第3図において、1は放熱板取付部1aと半導
体取付部1bからなる金属基板で、前記面取付部1aと
1bの間に薄肉部1dが設けられている。5は半導体素
子2を取付けた半導体取付部1bの表面およびその周囲
に一体に結合された樹脂体である。その他の構造は第2
図に示す従来例と同一であるから説明を省略する。
In FIGS. 1 to 3, reference numeral 1 denotes a metal substrate consisting of a heat sink mounting portion 1a and a semiconductor mounting portion 1b, and a thin wall portion 1d is provided between the surface mounting portions 1a and 1b. Reference numeral 5 denotes a resin body integrally bonded to the surface and periphery of the semiconductor mounting portion 1b to which the semiconductor element 2 is mounted. Other structures are second
Since it is the same as the conventional example shown in the figure, the explanation will be omitted.

本実施例は上記のように放熱板取付部1aと半導体取付
部1bの間に薄肉部1dを設けたので、放熱板取付部1
aのビス六6にビス(図示せず)をねじ込み、放熱板、
(図示せず)に放熱板取付部1aを締付けた場合に、放
熱板取付部1aは放熱板に沿って反り変形する。しかし
、放熱板取付部1aに放熱板を締付けた場合の変形は、
薄肉部1dで吸収される。
In this embodiment, as described above, the thin wall portion 1d is provided between the heat sink mounting portion 1a and the semiconductor mounting portion 1b.
Screw the screw (not shown) into screw 6 of a, and attach the heat sink,
When the heat sink mounting portion 1a is tightened (not shown), the heat sink mounting portion 1a warps and deforms along the heat sink. However, the deformation when the heat sink is tightened to the heat sink attachment part 1a is as follows.
It is absorbed by the thin wall portion 1d.

従って、半導体素子2および樹脂体5の取付けられた半
導体取付部1bは変形しないから、半導体取付部1bと
一体に結合された半導体素子2および樹脂体5もほとん
ど変形しない。
Therefore, since the semiconductor mounting portion 1b to which the semiconductor element 2 and the resin body 5 are attached is not deformed, the semiconductor element 2 and the resin body 5 that are integrally connected to the semiconductor attachment portion 1b are also hardly deformed.

第5図〜第7図と第8図〜第10図は本発明の別の実施
例を示している。
5-7 and 8-10 show other embodiments of the invention.

本実施例では、放熱板取付部1aが薄く形成されている
1本実施例では、放熱板取付部1aを締付けた場合の変
形が、薄い放熱板取付部1aだけで吸収されるため、半
導体取付部1bは変形しない。
In this embodiment, the heat sink mounting portion 1a is formed thinly. Part 1b is not deformed.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、金属基板を放熱板
に取付けた際に、半導体素子および樹脂体は変形しない
ので、その両者に生ずる引張応力は小さいからクラック
が発生するのを防止することができる。
As explained above, according to the present invention, when the metal substrate is attached to the heat sink, the semiconductor element and the resin body do not deform, so the tensile stress generated in both is small, so cracks can be prevented from occurring. Can be done.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第3図は、本発明の半導体装置の一実施例とし
て樹脂封止型パワーICの要部を示すもので第1図は正
面図、第2図は横断面図、第3図は側断面図、第4図〜
第6図は1本発明の別の一実施例の要部を示すもので、
第4図は正面図、第5図は横断面図、第6図は側面図、
第7図〜第9図は、本発明の更に他の一実施例の要部を
示すもので、第7図は正面図、第8図は横断面図、第9
図は側面図、第10ffl〜第13図は従来の樹脂封止
型パフ−ICを示すもので、第10図は正面図、第11
図は横断面図、第12図は側断面図、第13図は樹脂封
止型パワーICを放熱板に取付けた状態を示す正面図で
ある。 1・・・金属基板、1a・・・放熱板取付部、1b・・
・半導体取付部、1d・・・薄く形成した変形部。
1 to 3 show the main parts of a resin-sealed power IC as an embodiment of the semiconductor device of the present invention. FIG. 1 is a front view, FIG. 2 is a cross-sectional view, and FIG. 3 is a cross-sectional view. is a side sectional view, Figure 4~
FIG. 6 shows the main part of another embodiment of the present invention,
Figure 4 is a front view, Figure 5 is a cross-sectional view, Figure 6 is a side view,
7 to 9 show essential parts of still another embodiment of the present invention, in which FIG. 7 is a front view, FIG. 8 is a cross-sectional view, and FIG. 9 is a cross-sectional view.
The figure is a side view, Figures 10ffl to 13 show conventional resin-sealed puff ICs, Figure 10 is a front view, and Figures 11
12 is a cross-sectional view, FIG. 12 is a side sectional view, and FIG. 13 is a front view showing a resin-sealed power IC mounted on a heat sink. 1... Metal board, 1a... Heat sink mounting part, 1b...
- Semiconductor mounting part, 1d... thinly formed deformed part.

Claims (1)

【特許請求の範囲】 1、放熱板取付部と半導体取付部からなる金属基板と、
その半導体取付部に取付けられ、かつリード線に接続す
る半導体素子と、この半導体素子および前記半導体取付
部を覆うように金属基板に一体に結合された樹脂体から
なる半導体装置において、前記放熱板取付部と半導体取
付部の間に、少なくとも一部を薄く形成した変形手段を
有することを特徴とする半導体装置。 2、変形手段は、放熱板取付部と半導体取付部の間に形
成した薄肉部により構成されていることを特徴とする特
許請求の範囲第1項記載の半導体装置。 3、変形手段は、放熱板取付部の厚さを半導体取付部の
厚さより薄く形成することにより構成したことを特徴と
する半導体装置。
[Claims] 1. A metal substrate comprising a heat sink mounting portion and a semiconductor mounting portion;
In a semiconductor device comprising a semiconductor element attached to the semiconductor mounting part and connected to a lead wire, and a resin body integrally bonded to a metal substrate so as to cover the semiconductor element and the semiconductor mounting part, the heat sink mounting part is attached. 1. A semiconductor device comprising a deforming means, at least a portion of which is formed thin, between the part and the semiconductor mounting part. 2. The semiconductor device according to claim 1, wherein the deforming means is constituted by a thin portion formed between the heat sink mounting portion and the semiconductor mounting portion. 3. A semiconductor device, characterized in that the deformation means is configured by forming the heat sink mounting portion to be thinner than the semiconductor mounting portion.
JP7425485A 1985-04-10 1985-04-10 Semiconductor device Pending JPS61234058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7425485A JPS61234058A (en) 1985-04-10 1985-04-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7425485A JPS61234058A (en) 1985-04-10 1985-04-10 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS61234058A true JPS61234058A (en) 1986-10-18

Family

ID=13541832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7425485A Pending JPS61234058A (en) 1985-04-10 1985-04-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS61234058A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018939A (en) * 1983-07-13 1985-01-31 Hitachi Micro Comput Eng Ltd Resin seal type semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018939A (en) * 1983-07-13 1985-01-31 Hitachi Micro Comput Eng Ltd Resin seal type semiconductor device

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