JPS61232598A - 薄膜ｅｌ素子の製造方法 - Google Patents

薄膜ｅｌ素子の製造方法

Info

Publication number
JPS61232598A
JPS61232598A JP60073172A JP7317285A JPS61232598A JP S61232598 A JPS61232598 A JP S61232598A JP 60073172 A JP60073172 A JP 60073172A JP 7317285 A JP7317285 A JP 7317285A JP S61232598 A JPS61232598 A JP S61232598A
Authority
JP
Japan
Prior art keywords
film
thin film
emitting layer
insulating layer
si3n4
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60073172A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0124359B2 (cg-RX-API-DMAC7.html
Inventor
保暁 田村
純一 大脇
小暮　攻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP60073172A priority Critical patent/JPS61232598A/ja
Publication of JPS61232598A publication Critical patent/JPS61232598A/ja
Publication of JPH0124359B2 publication Critical patent/JPH0124359B2/ja
Granted legal-status Critical Current

Links

JP60073172A 1985-04-05 1985-04-05 薄膜ｅｌ素子の製造方法 Granted JPS61232598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60073172A JPS61232598A (ja) 1985-04-05 1985-04-05 薄膜ｅｌ素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60073172A JPS61232598A (ja) 1985-04-05 1985-04-05 薄膜ｅｌ素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61232598A true JPS61232598A (ja) 1986-10-16
JPH0124359B2 JPH0124359B2 (cg-RX-API-DMAC7.html) 1989-05-11

Family

ID=13510457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60073172A Granted JPS61232598A (ja) 1985-04-05 1985-04-05 薄膜ｅｌ素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61232598A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08111286A (ja) * 1994-10-07 1996-04-30 Tdk Corp 有機エレクトロルミネセンス素子の製法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190692U (cg-RX-API-DMAC7.html) * 1981-05-28 1982-12-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190692U (cg-RX-API-DMAC7.html) * 1981-05-28 1982-12-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08111286A (ja) * 1994-10-07 1996-04-30 Tdk Corp 有機エレクトロルミネセンス素子の製法

Also Published As

Publication number Publication date
JPH0124359B2 (cg-RX-API-DMAC7.html) 1989-05-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees