JPS61232543A - 試料移動装置 - Google Patents

試料移動装置

Info

Publication number
JPS61232543A
JPS61232543A JP60074138A JP7413885A JPS61232543A JP S61232543 A JPS61232543 A JP S61232543A JP 60074138 A JP60074138 A JP 60074138A JP 7413885 A JP7413885 A JP 7413885A JP S61232543 A JPS61232543 A JP S61232543A
Authority
JP
Japan
Prior art keywords
sample
axis
sample holder
gimbal
along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60074138A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572699B2 (enExample
Inventor
Haruyuki Okabe
岡部　春幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60074138A priority Critical patent/JPS61232543A/ja
Publication of JPS61232543A publication Critical patent/JPS61232543A/ja
Publication of JPH0572699B2 publication Critical patent/JPH0572699B2/ja
Granted legal-status Critical Current

Links

JP60074138A 1985-04-08 1985-04-08 試料移動装置 Granted JPS61232543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60074138A JPS61232543A (ja) 1985-04-08 1985-04-08 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60074138A JPS61232543A (ja) 1985-04-08 1985-04-08 試料移動装置

Publications (2)

Publication Number Publication Date
JPS61232543A true JPS61232543A (ja) 1986-10-16
JPH0572699B2 JPH0572699B2 (enExample) 1993-10-12

Family

ID=13538520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60074138A Granted JPS61232543A (ja) 1985-04-08 1985-04-08 試料移動装置

Country Status (1)

Country Link
JP (1) JPS61232543A (enExample)

Also Published As

Publication number Publication date
JPH0572699B2 (enExample) 1993-10-12

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