JPS61232271A - 高密度窒化珪素焼結体の製造方法 - Google Patents

高密度窒化珪素焼結体の製造方法

Info

Publication number
JPS61232271A
JPS61232271A JP60072532A JP7253285A JPS61232271A JP S61232271 A JPS61232271 A JP S61232271A JP 60072532 A JP60072532 A JP 60072532A JP 7253285 A JP7253285 A JP 7253285A JP S61232271 A JPS61232271 A JP S61232271A
Authority
JP
Japan
Prior art keywords
silicon nitride
glass
temperature
sintered body
nitrogen gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60072532A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0159996B2 (enExample
Inventor
隆男 藤川
宮永　順一
岡田　広
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60072532A priority Critical patent/JPS61232271A/ja
Publication of JPS61232271A publication Critical patent/JPS61232271A/ja
Publication of JPH0159996B2 publication Critical patent/JPH0159996B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP60072532A 1985-04-08 1985-04-08 高密度窒化珪素焼結体の製造方法 Granted JPS61232271A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60072532A JPS61232271A (ja) 1985-04-08 1985-04-08 高密度窒化珪素焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60072532A JPS61232271A (ja) 1985-04-08 1985-04-08 高密度窒化珪素焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS61232271A true JPS61232271A (ja) 1986-10-16
JPH0159996B2 JPH0159996B2 (enExample) 1989-12-20

Family

ID=13492046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60072532A Granted JPS61232271A (ja) 1985-04-08 1985-04-08 高密度窒化珪素焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS61232271A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006273643A (ja) * 2005-03-29 2006-10-12 Kyocera Corp 焼結体および配線基板ならびにその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258714A (en) * 1975-11-08 1977-05-14 Sumitomo Electric Industries Thermal static hydraulic pressure molding method
JPS57106575A (en) * 1980-12-19 1982-07-02 Kobe Steel Ltd Manufacture of high density silicon nitride sintered body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258714A (en) * 1975-11-08 1977-05-14 Sumitomo Electric Industries Thermal static hydraulic pressure molding method
JPS57106575A (en) * 1980-12-19 1982-07-02 Kobe Steel Ltd Manufacture of high density silicon nitride sintered body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006273643A (ja) * 2005-03-29 2006-10-12 Kyocera Corp 焼結体および配線基板ならびにその製造方法

Also Published As

Publication number Publication date
JPH0159996B2 (enExample) 1989-12-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term