JPS6122855B2 - - Google Patents
Info
- Publication number
- JPS6122855B2 JPS6122855B2 JP52126304A JP12630477A JPS6122855B2 JP S6122855 B2 JPS6122855 B2 JP S6122855B2 JP 52126304 A JP52126304 A JP 52126304A JP 12630477 A JP12630477 A JP 12630477A JP S6122855 B2 JPS6122855 B2 JP S6122855B2
- Authority
- JP
- Japan
- Prior art keywords
- diffusion
- gaas
- diffused
- diffusion source
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12630477A JPS5459075A (en) | 1977-10-19 | 1977-10-19 | Diffusing method of impurity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12630477A JPS5459075A (en) | 1977-10-19 | 1977-10-19 | Diffusing method of impurity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5459075A JPS5459075A (en) | 1979-05-12 |
| JPS6122855B2 true JPS6122855B2 (OSRAM) | 1986-06-03 |
Family
ID=14931878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12630477A Granted JPS5459075A (en) | 1977-10-19 | 1977-10-19 | Diffusing method of impurity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5459075A (OSRAM) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS492511A (OSRAM) * | 1972-04-20 | 1974-01-10 | ||
| JPS5023562A (OSRAM) * | 1973-06-29 | 1975-03-13 | ||
| JPS5311574A (en) * | 1976-07-19 | 1978-02-02 | Fujitsu Ltd | Production of semiconductor device |
| JPS6011801A (ja) * | 1983-06-30 | 1985-01-22 | Fujitsu Ltd | 立体デイスプレイ装置 |
-
1977
- 1977-10-19 JP JP12630477A patent/JPS5459075A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5459075A (en) | 1979-05-12 |
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