JPS61226419A - Feeding method of work - Google Patents
Feeding method of workInfo
- Publication number
- JPS61226419A JPS61226419A JP6579885A JP6579885A JPS61226419A JP S61226419 A JPS61226419 A JP S61226419A JP 6579885 A JP6579885 A JP 6579885A JP 6579885 A JP6579885 A JP 6579885A JP S61226419 A JPS61226419 A JP S61226419A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- pellet
- liquid
- pellets
- device body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- De-Stacking Of Articles (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はワークの供給方法、特に微小寸法物体の供給に
好適な供給方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for supplying a workpiece, and particularly to a method suitable for supplying objects of minute dimensions.
微小ワーク、例えは１ｍ角以下の半導体ペレットや半田
ペレット、半田球等の供給装置としては、第９図に示す
ごとく、中空体ａの上面にマトリックス状に多数の円形
状のペレット吸引孔ｂ・・・を穿設すると共に、これら
各吸引孔すの底面と中空体の中空部Ｃとを透孔ｄ・・・
を介して連通し吸引ポンプ（９示せず）により中空部ｃ
ｆ負圧にしてペレット・・・・を各吸引孔ｂ・・・内に
吸着させるごとく成していた。As shown in Fig. 9, as a feeding device for micro workpieces, such as semiconductor pellets, solder pellets, solder balls, etc. of 1 m square or less, a large number of circular pellet suction holes b, ..., and the bottom surface of each suction hole and the hollow part C of the hollow body are penetrated through the hole d...
A suction pump (9 not shown) communicates with the hollow part c.
F negative pressure was applied so that the pellets were adsorbed into each suction hole b.
ＤＨＤ型ダイオードの製造にはこの供給装置を用い、吸
引孔ｂ・・・の数の数倍のペレット・・・・を供給して
中空体ａを振動あるいは揺動させて、ペレット・・・・
を吸引孔ｂ・・・内に落下せしめ、各吸引孔すにペレッ
ト・が位置したのを確認して後、吸引ポンプを作動させ
てペレット・を吸引孔す側に吸着した状態で反転し、第
１０図に示すごとき組立治具葺上に位置する。続いて、
吸引ポンプの吸引を停止させて、ペレット・・・・を第
１０図組立治具ｆ側に落下供給する。図中ｇはがラスバ
？レプ、ｈはスラグリードで、治具ｆの凹孔に予め収容
されている。This feeding device is used to manufacture DHD type diodes, and the hollow body a is vibrated or rocked by feeding pellets several times the number of suction holes b...
After confirming that the pellets are placed in each suction hole, the suction pump is activated and the pellets are adsorbed to the suction hole side, and the pellets are turned over. The assembly jig is located on the roof as shown in FIG. continue,
The suction of the suction pump is stopped, and the pellets are dropped and supplied to the assembly jig f side in Fig. 10. Is g in the diagram the last bar? Rep, h is a slug lead, which is housed in advance in the recessed hole of the jig f.
しかし、上記したペレットの供給装置にあっては、多数
のペレット・・・・が供給されて振動、揺動されて配列
されるため、ペレット・・・・がペレット・同士あるい
は中空体ａと衝突して破損し易く、その破損の結果生じ
たペレット・・・・の破片が前記透孔ｄ・・・等に詰っ
てしまい、吸引孔ｂ・・・におけるペレット・・・・の
吸着が不能となったり、あるいはペレット・・・・がほ
ぼ立方体形状の場合にはいわゆるペレツト立ちの状態で
吸引孔ｂ・・・側に吸着されることも多く、製造歩留り
を悪くする一因となっていた。However, in the pellet feeding device described above, a large number of pellets are supplied, vibrated, rocked, and arranged, so that the pellets collide with each other or with the hollow body a. The pellets are easily damaged, and fragments of the pellets generated as a result of the damage clog the through holes d, etc., making it impossible to adsorb the pellets in the suction holes b. Or, if the pellets are approximately cubic in shape, they are often adsorbed to the side of the suction hole b in a so-called standing state, which is one of the causes of poor manufacturing yield.
そこで、上記した如くの問題点を解決すべく、上記装置
の改良案として、第１１図に示すごとく中空体ｊの下部
に多数のノズｒしｋ・・・を螺着せしめ、これらノズｔ
しｋ・・・には、中空体ｊの中空部と連通ずる吸引通路
ｌ・・・を穿設する一方、第１２図に示すごとく、前記
ノズｌＬ／ｋ・・・の間隔に合致せしめたペレット・・
・・の搬送回路ｍ・・・を有するベレット搬送装置ｎを
別に設け、前記中空体１上方より下降させて、ノズルｋ
・・・先端面が搬送回路ｍ・・・上のペレットｅ・・・
上面に接触すると吸引ポンプを作動させて、ノズｒしｋ
・・・側にペレット・・・・を吸着させ、その後上記し
た従来例と同様にしてペレット・・・・を組立治具ｆ側
に供給するものが提案されている。Therefore, in order to solve the above-mentioned problems, as an improvement plan for the above-mentioned device, as shown in FIG.
A suction passage l... which communicates with the hollow part of the hollow body j is bored in the nozzle lL/k... as shown in FIG. pellet··
A pellet conveying device n having a conveying circuit m... is separately provided, and is lowered from above the hollow body 1 to the nozzle k.
...The tip surface is the transport circuit m...The pellet e on top...
When it comes into contact with the top surface, the suction pump is activated and the nozzle is
It has been proposed that the pellets are adsorbed on the side of the assembly jig f, and then the pellets are fed to the f side of the assembly jig in the same manner as in the conventional example described above.
発明が解決しようとする問題点
上記改良案に係る微小物吸着装置にあっては、振動や揺
動によるペレット・・・・の破損はない。しかし、ノズ
ルｋ・・・の搬送装置ｎ側への下降時、ノズｒしｋ・・
・を少しでも下降させすぎると、ノズｒしｋ・・・先端
によシベレット・・・・を破損してしまうことをなり、
かかる場合には、やはりそれら破片を吸引通路１・・・
内に吸引してしまい、それら破片か吸引通路ｌ・・・内
に詰まってしまうといったこ七が起こり、その際のノズ
？しｋ・・・部の修復は、ノズＰしｋ・・・が狭い間隔
で林立されていることもあって、困難を極めていた。Problems to be Solved by the Invention In the micro object adsorption device according to the above-mentioned improvement plan, there is no damage to the pellets due to vibration or rocking. However, when the nozzle k... descends to the conveying device n side, the nozzle k...
If you lower the nozzle too much, you may damage the tip of the nozzle.
In such a case, those fragments are still removed from the suction passage 1...
If the debris gets sucked into the suction passage, the suction passage gets clogged. Restoration of the nozzles P and K... was extremely difficult, partly because the nozzles P and K... were lined up at narrow intervals.
ま次、ノズＩしｋ・・・先端部におけるペレット・・・
・の吸ｔは安定せず、ペレット立ちの状態で吸着してし
まったり、あるいは、ペレット・・・・中心とノズＩし
ｋ・・・中心とが一致しない状態のままで吸着してしま
ったり、あるいは、ペレット・・・・にバンプ電極のよ
うな小突起が形成されていると、第１３図に示すごとく
ペレット・・・・を斜めに傾いたままの状態で吸着して
しまうこともあシ、かかる場合には、ペレット・・・・
の組立治具ｉ側への供給時、ペレット・・・・がガラス
バＩレブｇ・・・の角部等に衝突してペレット立ちの状
態でペレット・・・・を組立治具！側に供給してしまう
といった問題はいぜんとして残されていた。Next, nozzle I... pellet at the tip...
・The suction is not stable, and the pellet may be stuck in a standing state, or the pellet may be stuck in a state where the center of the nozzle and the center of the nozzle do not match. Or, if the pellet... has small protrusions such as bump electrodes formed on it, the pellet may be stuck at an angle as shown in Figure 13. In that case, pellets...
When feeding the pellets to the assembly jig i side, the pellets collide with the corners of the glass bar I rev g... and the pellets are left standing in the assembly jig! The problem of supplying it to other parties still remained.
本発明は、以上の如き問題点に鑑みなされたもので、微
小なワークでも破損させたりすることがなく、シかも正
確な位置に安定的にワークを被供給側に供給できる供給
方法を提供せんとするものであシ、下端面に液体を保持
し得るようにした突出体に、液体を付着させ、該液体を
介してワークを吸着するごとく成したことを特徴とする
ものである。The present invention has been made in view of the above-mentioned problems, and provides a supply method that can stably supply workpieces to the supplied side at precise positions without damaging even minute workpieces. This is characterized in that liquid is attached to a protruding body capable of holding liquid on its lower end surface, and the workpiece is adsorbed through the liquid.
実 施 例 以下、本発明の実施例を第１図装置から説明する。Example Embodiments of the present invention will be described below, starting from the apparatus shown in FIG.
１は、中空の装置本体であり、この装置本体１の下部に
、マトリックス状に多数の突出体（ノズ・し）１ａ・・
・を突設してあり、これら各ノズ・し１ａには、装置本
体１の中空部１ｂに連通する細径の透孔ＩＣを穿設しで
ある。また、装置本体１の中空部１ｂには、送風用のブ
ロアー（図示せず）′ｔ−接続しである。装置本体１は
、シリンダ機構２により上下動させられる一方、螺子駆
動機構３により水平方向に移動可能な構造となしである
。Reference numeral 1 denotes a hollow device body, and a large number of protrusions (nozzles) 1a...
Each of these nozzles 1a is provided with a small-diameter through hole IC that communicates with the hollow portion 1b of the main body 1 of the device. Further, a blower (not shown) for blowing air is connected to the hollow portion 1b of the main body 1. The main body 1 of the apparatus has a structure in which it can be moved vertically by a cylinder mechanism 2 and horizontally by a screw drive mechanism 3.
４は液槽であり、揮発性の液体、たとえばア・レコー・
し等が貯溜されている。５はワーク（ペレット）・・・
を整列状台で装置本体１側に吸着させるためのベレット
搬送機、６はペレットを受は取る組立治具である。この
組立治具６のペレット受取り孔６ａ・・・に庁予めガラ
スバーレプ６ｂ・・・及びスラグリード６ｃ・・・を配
置しである。4 is a liquid tank containing a volatile liquid, such as a recorder.
etc. are stored. 5 is the work (pellet)...
6 is an assembly jig for receiving and picking up the pellets. Glass bars 6b and slag leads 6c are placed in advance in the pellet receiving holes 6a of the assembly jig 6.
しかして、第１図装置にあっては、まず、装置本体１２
！！−液槽４上に位置し、シリンダ機構２を駆動させて
ノズＩし１ａ・・・先端部が少し液面に浸漬される位置
まで装置本体１を下降させ、ノズｒし１ａ・・・先端部
に過敏の液滴７を付着させると共に１中空本体１ｔ−外
気と連通して前記透孔１ｃ・・・内にも、毛細管現象を
利用して液体を吸入させておく。In the apparatus shown in FIG. 1, first, the apparatus main body 12
! ! - Located above the liquid tank 4, drive the cylinder mechanism 2 to make the nozzle 1a...lower the device main body 1 to a position where the tip is slightly immersed in the liquid level, and make the nozzle 1a...the tip. At the same time, a sensitive liquid droplet 7 is attached to the hollow body 1t and communicated with the outside air, and liquid is sucked into the through holes 1c by utilizing capillary phenomenon.
そして、装置本体１を上昇させた後、装置本体１をベレ
ット搬送機５上にまで移動させ、しかる後、ノズＩし１
ａ・・・先端に付着させた液滴７がペレット８・・・Ｋ
接触する状態まで装置本体１を下降させる。そして液滴
７の表面張力を利用してノズル１ｍ・・・先端部にペレ
ット８・・・を吸着させ、ふたたび装置本体１を上昇せ
しめ九後、装置本体１を前方に移動させて組立治具６上
に位置せしめ、この組立治具６側にペレット８・・・を
供給すべく、装置本体１を下降さ−する。そして、ノズ
２しｌ−・・・先端部より組立治具６側にペレット８・
・・を転移させるべく、送風用プロア−より装置本体１
の中空部ｌｂ内に与圧してノズ？し１ａ・・・先端部に
付着させた液滴７と共にペレット８・・・を組立治具６
側のペレット受取孔６ａ・・・に落下させる。その後、
組立治具６は真空引きして加熱されるため、これら工程
において液滴７は蒸散させられ、組立治具６側に液滴７
が残ることはない。After raising the device body 1, the device body 1 is moved to the top of the pellet conveyor 5, and then the nozzle 1 is
a...The droplet 7 attached to the tip is a pellet 8...K
The main body 1 of the device is lowered until it makes contact. Then, using the surface tension of the droplets 7, the pellets 8 are adsorbed to the tip of the nozzle 1m, and the device body 1 is raised again. 6, and the main body 1 of the apparatus is lowered to supply the pellets 8 to the assembly jig 6 side. Then, the pellet 8 is placed on the assembly jig 6 side from the tip of the nozzle 2.
In order to transfer ..., the main body 1 of the device is
Pressurize the hollow part lb of the nozzle? 1a...The pellet 8... is assembled into the assembly jig 6 together with the droplet 7 attached to the tip.
The pellets are dropped into the pellet receiving hole 6a on the side. after that,
Since the assembly jig 6 is evacuated and heated, the droplets 7 are evaporated during these steps, and the droplets 7 are placed on the side of the assembly jig 6.
will not remain.
以上の如く本発明によればノズｒし１ａ・・・先端部が
直接ペレット８・・・に接触することなく、ペレット８
・・・とノズル１ａ・・・との間には、液滴７・・・が
存在しているため、ペレット８・・・がノズｌし１ａ・
・・によシ圧潰されるといった問題は生じない。また、
ノズ？し１ａ・・・はエアーを吸引するものではない次
め、ベレット訃・・の破片が透孔ＩＣ・・・に詰まるこ
とがない。As described above, according to the present invention, the tip of the nozzle 1a does not directly contact the pellets 8...
Since the droplet 7 exists between the nozzle 1a and the nozzle 1a, the pellet 8 and the nozzle 1a
...There will be no problem of being crushed. Also,
Noz? 1a... is not for suctioning air.Secondly, debris from the beret... does not clog the through hole IC....
さらに、ノズリレ１ａ・・・先端部に吸着されるペレッ
ト８・・・は、第５図に示すごとく、液滴７・・・の表
面張力の作用により、ノズＩし１ａ・・・先端中央箇所
に正確に位置せしめられることとなるため、ペレット８
・・・の組立治具６側への供給時、ペレット受取孔６ａ
の中心に供給でき、その結果、ペレット立ちが生じると
いったことも起こらない。Further, as shown in FIG. 5, the pellet 8 adsorbed at the tip of the nozzle 1a is moved to the center of the tip by the action of the surface tension of the droplet 7. Pellets 8
When feeding the pellets to the assembly jig 6 side, the pellet receiving hole 6a
As a result, pellets do not stand up.
また、他の実施例として、突出体１ａはノズｒしだけで
なく第６図に示すごとく、下面及び両側面に開口した断
面コ字状の凹部１ｄ、あるいけ第７図に示すごとく、半
球状の凹部１・を形成してもよく、かかる構成となすこ
とによっても、ノズ？し１ａ・・・先端部に液滴を適量
付着させることは可能である。In addition, as another embodiment, the protruding body 1a has not only a nozzle r, but also a recess 1d having a U-shaped cross section opening on the lower surface and both side surfaces as shown in FIG. It is also possible to form a recess 1 in the shape of a nozzle. 1a... It is possible to deposit an appropriate amount of droplets on the tip.
また液の供給は液槽４を用いるだけでなく、本体１円か
ら供給するようにしてもよい。Moreover, the liquid may be supplied not only by using the liquid tank 4 but also from the main body.
また組立治具６のペレット受取孔６ａ・・・に、第８図
に示すごとく、ペレット８・・・を浸漬沈降させられる
だけの液滴７ａ・・・を存在させておくことにより、ノ
ズル１１・・・側に付着しているペレット８・・・の受
は渡しを極めてスムーズに行うことができる。In addition, as shown in FIG. 8, by making enough droplets 7a exist in the pellet receiving holes 6a of the assembly jig 6 to immerse and settle the pellets 8, the nozzle 11 The pellets 8 attached to the sides can be transferred extremely smoothly.
尚、突出体１ａ・・・の形成は、平板部に溝を刻設する
ことにより相対的に突出させ丸形状となし、容易に製作
でき、またワークの面積に対応して突出体を設けること
によって微小ワークだけでなく、大面積のワークも取り
出し得る。The protrusions 1a... can be easily manufactured by carving a groove in the flat plate part so that they protrude relatively to each other, and the protrusions 1a can be formed in accordance with the area of the workpiece. This makes it possible to extract not only small workpieces but also large-area workpieces.
発明の効果
以上の説ＩＵＫより明らかなごとく、本発明によれば微
小物の装置側への吸着時、微小物を圧潰してしまうよう
なことは起こらず、しかも、微小物を所定箇所に正確に
安定的に供給できるのである。As is clear from IUK, according to the present invention, when a minute object is adsorbed to the device side, no crushing of the minute object occurs, and moreover, the minute object can be accurately placed in a predetermined location. This means that a stable supply can be provided.
第１図は、本発明を説明するための供給装置の概略説明
図、第２図は装置本体の部分拡大断面図、第３図はペレ
ット搬送機の部分拡大断面図、第４図は組立治具の部分
拡大断面図、第５図はノズ？しの部分拡大断面図、第６
図、第７図は他の実施例の要部を示す部分拡大断面図、
第８図は他の実施例の組立治具の部分拡大断面図、第９
図は従来例を示すｌ！部の部分拡大断面図、第１０図は
組立治具の部分拡大断面図、第１１図は他の従来例を示
す要部の部分拡大断面図、第１２図はペレット搬送装置
の部分平面図、第１３図はペレットの吸着状態の説明図
である。
１ａ・・・突出体、７・・・液滴、８・・・ワーク（ペ
レット）。
第１図
す
第２図 第３図
第６図 第７図
第８図
第９図
第１０図
第１１図
第１３図Fig. 1 is a schematic explanatory diagram of the feeding device for explaining the present invention, Fig. 2 is a partially enlarged sectional view of the main body of the device, Fig. 3 is a partially enlarged sectional view of the pellet conveying machine, and Fig. 4 is an assembly jig. Partially enlarged cross-sectional view of the ingredient, Figure 5 is the nozzle? Partial enlarged cross-sectional view, No. 6
FIG. 7 is a partially enlarged sectional view showing the main parts of another embodiment,
FIG. 8 is a partially enlarged sectional view of an assembly jig according to another embodiment, and FIG.
The figure shows a conventional example! FIG. 10 is a partially enlarged sectional view of the assembly jig, FIG. 11 is a partially enlarged sectional view of the main part showing another conventional example, FIG. 12 is a partial plan view of the pellet conveying device, FIG. 13 is an explanatory diagram of the adsorption state of pellets. 1a... Protruding body, 7... Droplet, 8... Work (pellet). Figure 1 Figure 2 Figure 3 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 13
Claims (1)
を付着させ、該液体を介してワークを吸着するごとくな
したワークの供給方法。A method for supplying a workpiece, in which a liquid is attached to a protruding body capable of holding liquid on its lower end surface, and the workpiece is adsorbed through the liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6579885A JPS61226419A (en) | 1985-03-28 | 1985-03-28 | Feeding method of work |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6579885A JPS61226419A (en) | 1985-03-28 | 1985-03-28 | Feeding method of work |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61226419A true JPS61226419A (en) | 1986-10-08 |
Family
ID=13297405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6579885A Pending JPS61226419A (en) | 1985-03-28 | 1985-03-28 | Feeding method of work |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61226419A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008118122A (en) * | 2006-10-11 | 2008-05-22 | Juki Corp | Method and device for packaging electronic component |
| WO2014015891A1 (en) * | 2012-07-23 | 2014-01-30 | Ismeca Semiconductor Holding Sa | A component handling head |
| EP2881980A1 (en) * | 2013-12-06 | 2015-06-10 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and apparatus for assembling a component with a flexible foil, as well as the assembled product |
-
1985
- 1985-03-28 JP JP6579885A patent/JPS61226419A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008118122A (en) * | 2006-10-11 | 2008-05-22 | Juki Corp | Method and device for packaging electronic component |
| WO2014015891A1 (en) * | 2012-07-23 | 2014-01-30 | Ismeca Semiconductor Holding Sa | A component handling head |
| EP2881980A1 (en) * | 2013-12-06 | 2015-06-10 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and apparatus for assembling a component with a flexible foil, as well as the assembled product |
| WO2015084164A1 (en) * | 2013-12-06 | 2015-06-11 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method and apparatus for assembling a component with a flexible foil, as well as the assembled product |
| US9918392B2 (en) | 2013-12-06 | 2018-03-13 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method and apparatus for assembling a component with a flexible foil, as well as the assembled product |
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