JPS6122341A - ネガ型レジストの現像方法 - Google Patents

ネガ型レジストの現像方法

Info

Publication number
JPS6122341A
JPS6122341A JP14228884A JP14228884A JPS6122341A JP S6122341 A JPS6122341 A JP S6122341A JP 14228884 A JP14228884 A JP 14228884A JP 14228884 A JP14228884 A JP 14228884A JP S6122341 A JPS6122341 A JP S6122341A
Authority
JP
Japan
Prior art keywords
ketone
solvent
polymer
developing
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14228884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356627B2 (enExample
Inventor
Shiro Nagaoka
長岡　史郎
Takeshi Sukegawa
助川　健
Sanjiyu Fukuda
三寿 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Tosoh Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Toyo Soda Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Toyo Soda Manufacturing Co Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14228884A priority Critical patent/JPS6122341A/ja
Publication of JPS6122341A publication Critical patent/JPS6122341A/ja
Publication of JPH0356627B2 publication Critical patent/JPH0356627B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/18—Diazo-type processes, e.g. thermal development, or agents therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP14228884A 1984-07-11 1984-07-11 ネガ型レジストの現像方法 Granted JPS6122341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14228884A JPS6122341A (ja) 1984-07-11 1984-07-11 ネガ型レジストの現像方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14228884A JPS6122341A (ja) 1984-07-11 1984-07-11 ネガ型レジストの現像方法

Publications (2)

Publication Number Publication Date
JPS6122341A true JPS6122341A (ja) 1986-01-30
JPH0356627B2 JPH0356627B2 (enExample) 1991-08-28

Family

ID=15311888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14228884A Granted JPS6122341A (ja) 1984-07-11 1984-07-11 ネガ型レジストの現像方法

Country Status (1)

Country Link
JP (1) JPS6122341A (enExample)

Also Published As

Publication number Publication date
JPH0356627B2 (enExample) 1991-08-28

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