JPH0356627B2 - - Google Patents

Info

Publication number
JPH0356627B2
JPH0356627B2 JP59142288A JP14228884A JPH0356627B2 JP H0356627 B2 JPH0356627 B2 JP H0356627B2 JP 59142288 A JP59142288 A JP 59142288A JP 14228884 A JP14228884 A JP 14228884A JP H0356627 B2 JPH0356627 B2 JP H0356627B2
Authority
JP
Japan
Prior art keywords
ketone
developing
resist
solvent
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59142288A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122341A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59142288A priority Critical patent/JPS6122341A/ja
Publication of JPS6122341A publication Critical patent/JPS6122341A/ja
Publication of JPH0356627B2 publication Critical patent/JPH0356627B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/18—Diazo-type processes, e.g. thermal development, or agents therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59142288A 1984-07-11 1984-07-11 ネガ型レジストの現像方法 Granted JPS6122341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59142288A JPS6122341A (ja) 1984-07-11 1984-07-11 ネガ型レジストの現像方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59142288A JPS6122341A (ja) 1984-07-11 1984-07-11 ネガ型レジストの現像方法

Publications (2)

Publication Number Publication Date
JPS6122341A JPS6122341A (ja) 1986-01-30
JPH0356627B2 true JPH0356627B2 (enExample) 1991-08-28

Family

ID=15311888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59142288A Granted JPS6122341A (ja) 1984-07-11 1984-07-11 ネガ型レジストの現像方法

Country Status (1)

Country Link
JP (1) JPS6122341A (enExample)

Also Published As

Publication number Publication date
JPS6122341A (ja) 1986-01-30

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