JPS6122257B2 - - Google Patents
Info
- Publication number
- JPS6122257B2 JPS6122257B2 JP5427680A JP5427680A JPS6122257B2 JP S6122257 B2 JPS6122257 B2 JP S6122257B2 JP 5427680 A JP5427680 A JP 5427680A JP 5427680 A JP5427680 A JP 5427680A JP S6122257 B2 JPS6122257 B2 JP S6122257B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating substrate
- comb
- shaped electrode
- semiconductor
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 50
- 239000004065 semiconductor Substances 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 4
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 229910002089 NOx Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910001954 samarium oxide Inorganic materials 0.000 description 2
- 229940075630 samarium oxide Drugs 0.000 description 2
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5427680A JPS56151348A (en) | 1980-04-25 | 1980-04-25 | Nitrogen oxide compound sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5427680A JPS56151348A (en) | 1980-04-25 | 1980-04-25 | Nitrogen oxide compound sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56151348A JPS56151348A (en) | 1981-11-24 |
| JPS6122257B2 true JPS6122257B2 (de) | 1986-05-30 |
Family
ID=12966042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5427680A Granted JPS56151348A (en) | 1980-04-25 | 1980-04-25 | Nitrogen oxide compound sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56151348A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58201052A (ja) * | 1982-05-20 | 1983-11-22 | Matsushita Electric Ind Co Ltd | ガスセンサ |
| JPS6486052A (en) * | 1987-09-29 | 1989-03-30 | Osaka Gas Co Ltd | Gas sensor |
| KR20030021612A (ko) * | 2001-09-07 | 2003-03-15 | 박진성 | 이종접합 후막센서 및 그의 제조 방법 |
-
1980
- 1980-04-25 JP JP5427680A patent/JPS56151348A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56151348A (en) | 1981-11-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4657659A (en) | Electrochemical element | |
| JP3128114B2 (ja) | 窒素酸化物検出装置 | |
| JPS6228422B2 (de) | ||
| US5824271A (en) | Gas sensor | |
| JPH04216452A (ja) | 混合気の組成とガス速度を同時に検出するためのセンサ | |
| JP2811976B2 (ja) | 酸化物半導体ガスセンサ | |
| JPS6122257B2 (de) | ||
| JPS6122256B2 (de) | ||
| JP2615138B2 (ja) | 複合ガスセンサ | |
| USH427H (en) | Air/fuel ratio detector | |
| JPH01201149A (ja) | 複合ガスセンサ | |
| JP2004325218A (ja) | 温度制御装置および温度制御方法ならびにそれらを用いたガス検出装置 | |
| JPH08278273A (ja) | ガス検知装置 | |
| JPH0220681Y2 (de) | ||
| JP2849588B2 (ja) | 薄膜ガスセンサ及びその製造方法 | |
| JP2955583B2 (ja) | ガスセンサ用検知素子 | |
| JP3696494B2 (ja) | 窒素酸化物センサ | |
| JPS5811846A (ja) | Ｎｏ↓２ガス検知方法 | |
| JP3395957B2 (ja) | 一酸化炭素検出センサ及びそれを用いた一酸化炭素検出方法 | |
| JPS589052A (ja) | 複合ガス検知素子 | |
| RU2291417C1 (ru) | Датчик определения концентрации газов | |
| JPH01321348A (ja) | 水素ガスセンサー | |
| JPH053974Y2 (de) | ||
| JPH0550702B2 (de) | ||
| JPS63184049A (ja) | ガスセンサの製造方法 |